Origin and repartition of the oxide fixed charges generated by electrical stress in memory tunnel oxide

Bernardini, Sandrine; Masson, Pascal; Houssa, Michel; Lalande, Frederic
May 2004
Applied Physics Letters;5/24/2004, Vol. 84 Issue 21, p4251
Academic Journal
A method is proposed to determine the origin and the spatial oxide fixed charge repartition in memory tunnel oxide from Fowler–Nordheim current measurements after electrical stress. The Poisson equation resolution in the dielectric layer is required to account for the nonsymmetric tunneling barrier deformation, resulting from charges generated within the dielectric layer. From current–voltage characteristics measurements and simulations, we have determined the spatial distribution of the oxide fixed charges within the dielectric layer of metal/SiO2/metal structures. In addition, the kinetics of the oxide charge generation can be explained by a dispersive hydrogen transport model. © 2004 American Institute of Physics.


Related Articles

  • Poisson’s ratio of the fcc hard sphere crystal at high densities. Tretiakov, Konstantin V.; Wojciechowski, Krzysztof W. // Journal of Chemical Physics;8/15/2005, Vol. 123 Issue 7, p074107 

    Elastic constants and the Poisson ratio of the fcc hard-sphere crystalline phases, free of defects and with vacancies, are determined by two Monte Carlo methods: (i) the analysis of the box fluctuations in the constant pressure ensemble with variable box shape (N-P-T) and (ii) by the free-energy...

  • Students' Compendium - Statistics. Gosling, G. P. // Management Services;Feb1980, Vol. 24 Issue 2, p29 

    The article covers the poisson and negative exponential distributions in queueing and machine interference. The prime fundamental processes of change in nature over time are described in mathematical terms as linear, power or exponential. In exponential relationships the variable appears as the...

  • Exact Solutions to The Variable Coefficient Combined BBM and m-BBM Equation. Mingxing Zhu // International Journal of Mathematical & Computer Sciences;2011, Vol. 7 Issue 2, p42 

    This paper studies the exact solutions of variable coefficient combined BBM and m-BBM equation by the extended F-expansion method. Firstly, the variable coefficient combined BBM and m-BBM equation is converted into a standard elliptic equation after linear transformations, and the exact...

  • On the structure of the set of central motions for the skew product of interval mappings. Efremova, L. // Journal of Mathematical Sciences;Sep2007, Vol. 145 Issue 5, p5219 

    The article discusses the structure of the set of central motions for the skew product of interval mappings. It notes that the concept of a Poisson stable trajectory is due to Poincare. It outlines the considerations related to the center of a dynamical system. It notes that if the center of a...

  • Long-Time Dynamics of the Schrödinger–Poisson–Slater System. Sánchez, Óscar; Soler, Jual // Journal of Statistical Physics;Jan2004, Vol. 114 Issue 1/2, p179 

    In this paper we analyze the asymptotic behaviour of solutions to the Schrödinger–Poisson–Slater (SPS) system in the frame of semiconductor modeling. Depending on the potential energy and on the physical constants associated with the model, the repulsive SPS system develops...

  • Quantum point contact due to Fermi-level pinning and doping profiles in semiconductor nanocolumns. Indlekofer, K. M.; Goryll, M.; Wensorra, J.; Lepsa, M. I. // Applied Physics A: Materials Science & Processing;Jun2007, Vol. 87 Issue 3, p559 

    We show that nanoscale doping profiles inside a nanocolumn in combination with Fermi-level pinning at the surface give rise to the formation of a saddle-point in the potential profile. Consequently, the lateral confinement inside the channel varies along the transport direction, yielding an...

  • Self-consistent Calculation of Band Diagram and Carrier Distribution of Type-II Interband Cascade Lasers. Peng, Peng; Mu, Yao-Ming; Pei, S. S. // AIP Conference Proceedings;2005, Vol. 772 Issue 1, p1549 

    By solving the one-dimensional time-independent Schrödinger equation and Poisson equation simultaneously, we have numerically simulated the energy-band diagram and steady-state carrier distribution of the type-II Interband cascade lasers based on InAs/InGaSb/AlSb multi-quantum wells. The...

  • ON A POISSON'S EQUATION ARISING FROM MAGNETISM. LUSSARDI, LUCA // Discrete & Continuous Dynamical Systems - Series S;Aug2015, Vol. 8 Issue 4, p769 

    We review the proof of existence and uniqueness of the Poisson's equation Δu + divm = 0 whenever m is a unit L2-vector field on R3 with compact support; by standard linear potential theory we deduce also the H1-regularity of the unique weak solution.

  • Surface Charging of Polyimide Based on Radiation-induced Conductivity Model. Wang Ji; Qiu Jiawen; Qin Xiaogang; Wang Lihong // AIP Conference Proceedings;1/5/2009, Vol. 1087 Issue 1, p600 

    Radiation-induced conductivity (RIC) model is used in surface charging simulations to calculate the dielectric potential. The RIC model including continuity equation of current, Poisson equation and trapped charge rate equation aims at accurately simulate the surface charging process while...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics