In situ detection of faradaic current in probe oxidation using a dynamic force microscope

Kuramochi, Hiromi; Ando, Kazunori; Tokizaki, Takashi; Yokoyama, Hiroshi
May 2004
Applied Physics Letters;5/17/2004, Vol. 84 Issue 20, p4005
Academic Journal
A faradaic current on the order of a sub-pico-ampere was detected while fabricating two-dimensional oxide nanostructures on H-passivated Si(001) surfaces. The detected faradaic current has been shown to faithfully reflect the degree of probe oxidation with a clear dependence on the variation of voltage and the tip speed. The faradaic current in dynamic mode can serve as a sensitive monitor of the nano-oxidation reaction for implementing precise closed-loop control of the oxide growth.


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