Design of fully spatially coherent extreme-ultraviolet light sources

Libertun, Ariel R.; Xiaoshi Zhang; Paul, Ariel; Gagnon, Etienne; Popmintchev, Tenio; Backus, Sterling; Murnane, Margaret M.; Kapteyn, Henry C.; Christov, Ivan P.
May 2004
Applied Physics Letters;5/10/2004, Vol. 84 Issue 19, p3903
Academic Journal
We demonstrate experimentally that, in order to generate fully spatially coherent extreme-ultraviolet (EUV) beams using high-harmonic generation, it is necessary to guide the driving laser beam over long interaction lengths in gas-filled hollow waveguides. Numerical simulations show that, in propagating the laser through a long plasma-filled guide, the laser beam forms a stable eigenmode with uniform spatial phase, even at very high levels of ionization. This results in a compact, highly spatially coherent, EUV source useful for applications in EUV metrology, microscopy, interferometry, and holography.


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