Preparation and optical waveguide property of metal alkoxide solution-derived Pb(Zr0.5Ti0.5)O3 thick films

Hu, S.H.; Meng, X.J.; Hu, G.J.; Hu, J.H.; Dal, N.; Xu, L.; Liu, L.Y.; Li, D.X.
May 2004
Applied Physics Letters;5/3/2004, Vol. 84 Issue 18, p3609
Academic Journal
Pb(Zr0.5Ti0.5)O3 films with thickness of about 1.5 and 3.7 μm have been deposited on single-crystal SrTiO3 substrate by a sol-gel process from nonhydrolyzed metal alkoxide precursor. X-ray diffraction shows that the films exhibit a single perovskite phase with (001)-preferred orientation. Atomic force microscopy study indicates that the PZT film possesses a crack-free and smooth surface. The optical waveguide property has been examined by the prism-film coupling experiment. Four and 12 TE modes are observed for 1.5 and 3.7 μm PZT films, respectively. © 2004 American Institute of Physics.


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