Displacement measurement in real time using the attenuated total reflection technique

Jian Shi; Zhaungqi Cao, P.L.; Jun Zhu; Qishun Shen, P.L.
April 2004
Applied Physics Letters;4/26/2004, Vol. 84 Issue 17, p3253
Academic Journal
A simple displacement measurement based on the attenuated total reflection technique is proposed and experimentally demonstrated. By analyzing the fringe shift of the reflective pattern recorded on a CCD camera, a slight displacement, which corresponds to a change in the waveguide thickness, can be determined in real time with adequate accuracy. The measurement range of this method is about 240 μm, and its accuracy can reach 0.05 μm. © 2004 American Institute of Physics.


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