TITLE

Reflection/transmission confocal microscopy characterization of single-crystal diamond microlens arrays

AUTHOR(S)
Gu, E.; Choi, H. W.; Liu, C.; Griffin, C.; Girkin, J. M.; Watson, I. M.; Dawson, M. D.; McConnell, G.; Gurney, A. M.
PUB. DATE
April 2004
SOURCE
Applied Physics Letters;4/12/2004, Vol. 84 Issue 15, p2754
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Using the method of photoresist reflow and inductively coupled plasma dry etching, we have fabricated microlens arrays in type-IIa natural single-crystal diamond, with diameters down to 10 μm. The surface profile of the microlenses was characterized by atomic force microscopy and was found to match well with a spherical shape, with a surface roughness of better than 1.2 nm. To characterize the optical properties of these diamond microlens arrays, a laser scanning reflection/transmission confocal microscopy technique has been developed. This technique enabled the surface profile of the microlenses to be measured simultaneously with optical parameters including focal length and spot size, opening up an application area for confocal microscopy. © 2004 American Institute of Physics.
ACCESSION #
12754147

 

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