Dependence of the sputter-etching characteristics of strontium–titanate–oxide thin films on their structural properties

Stafford, L.; Gaidi, M.; Chaker, M.; Langlois, O.; Margot, J.; Schiettekatte, F.; Wei, P.
April 2004
Applied Physics Letters;4/5/2004, Vol. 84 Issue 14, p2500
Academic Journal
Sputter-etching characteristics of polycrystalline strontium–titanate–oxide (STO) thin films are investigated using a high-density argon plasma. STO thin films were grown by means of a reactive pulsed-laser deposition technique in which the buffer oxygen pressure was varied to change the structural properties of the films. The sputter-etch rate of the rf-biased films is found to linearly increase with the oxygen deposition pressure. This result is shown to be related to the corresponding decrease of the film density. This dependence of the etch rate on the structural properties of the films has very important consequences on etching studies and on the optimization of etching processes. © 2004 American Institute of Physics.


Related Articles

  • Dramatic mobility enhancements in doped SrTiO3 thin films by defect management. Kozuka, Y.; Hikita, Y.; Bell, C.; Hwang, H. Y. // Applied Physics Letters;7/5/2010, Vol. 97 Issue 1, p012107 

    We report bulk-quality n-type SrTiO3 (n-SrTiO3) thin films fabricated by pulsed laser deposition, with electron mobility as high as 6600 cm2 V-1 s-1 at 2 K and carrier density as low as 2.0×1018 cm-3 (∼0.02 at. %), far exceeding previous pulsed laser deposition films. This result stems...

  • Influence of the laser fluence on the electrical properties of pulsed-laser-deposited... Bu, S.D.; Park, B.H.; Kang, B.S.; Kang, S.H.; Noh, T.W.; Jo, W. // Applied Physics Letters;8/23/1999, Vol. 75 Issue 8, p1155 

    Examines polycrystalline SrBi[sub 2]Ta[sub 2]O[sub 9] ferroelectric thin films grown on Pt/Ti/SiO[sub 2]/Si substrate using pulsed-laser deposition. Control of the remnant polarization of the films by adjustment of the laser fluence; Electrical properties of the films; Relationship of the Bi...

  • Microstructure and electrical properties of textured Sr[sub 0.51] Ba[sub 0.48] La[sub 0.01] Nb[sub 2] O[sub 6] thin films. Song, Z.; Lin, C.; Wang, L.; Huang, J.; Hesse, D.; Zakharov, N.D.; Xu, H.; Okuyama, M. // Applied Physics A: Materials Science & Processing;2000, Vol. 70 Issue 3, p355 

    Sr[sub 0.51] Ba[sub 0.48] La[sub 0.01] Nb[sub 2] O[sub 6] (SBLN) thin films were prepared on platinized silicon substrates by pulsed laser deposition (PLD) combined with annealing technique. The preferred orientation, surface morphology, composition, and interfacial properties of the SBLN thin...

  • Growth of single-phase PrBa[sub 0.7]Sr[sub 1.3]Cu[sub 3]O[sub 7] thin films and the role of lattice strain on the transport properties. Zhao, Y. G.; Dong, Z. W.; Rajeswari, M.; Sharma, R. P.; Venkatesan, T. // Applied Physics Letters;2/23/1998, Vol. 72 Issue 8 

    Single-phase PrBa[sub 0.7]Sr[sub 1.3]Cu[sub 3]O[sub 7] thin films with the Sr dopant concentration exceeding the solid solubility limit were epitaxially grown on (001) SrTiO[sub 3] and (001) LaAlO[sub 3] substrates by pulsed laser deposition (PLD) method. The resistivity of the doped films grown...

  • Epitaxial growth of non-c-oriented SrBi[sub 2]Nb[sub 2]O[sub 9] on (111) SrTiO[sub 3]. Lettieri, J.; Zurbuchen, M. A.; Jia, Y.; Schlom, D. G.; Streiffer, S. K.; Hawley, M. E. // Applied Physics Letters;5/15/2000, Vol. 76 Issue 20 

    Epitaxial SrBi[sub 2]Nb[sub 2]O[sub 9] thin films have been grown with a (103) orientation on (111) SrTiO[sub 3] substrates by pulsed-laser deposition. Four-circle x-ray diffraction and transmission electron microscopy reveal nearly phase-pure epitaxial films. Epitaxial (111) SrRuO[sub 3]...

  • Growth and small polaron properties of epitaxial La1-xCaxMnO3 thin films. Worledge, D.C.; Mieville, L.; Geballe, T.H. // Journal of Applied Physics;6/1/1998 Part 1 of 2, Vol. 83 Issue 11, p5913 

    Provides information on a study which focused on the La1-xCaxMnO thin films' epitaxial growth and properties, which were deposited by pulsed laser ablation. Characterization of the thin films; Observation of the presence of oxygen during the postdepositing annealing; Methodology used to conduct...

  • Pressure dependence of Bi-Sr-Ca-Cu-O phases with laser deposition technique. Narumi, E.; Lee, J.; Li, C.; Hosokawa, S.; Patel, S.; Shaw, D.T. // Applied Physics Letters;12/9/1991, Vol. 59 Issue 24, p3180 

    Examines the dependence of laser ablated Bi-Sr-Ca-Cu-O films on pressure. Construction of films via laser deposition; Role of oxygen in controlling the phases; Achievement of purer phase of the film.

  • Oxygen deficiency dependence of magnetic and magnetoresistive properties for La[sub 0.5] Sr[sub 0.5] CoO[sub 3-x] thin films prepared by pulsed laser deposition. Huang, Q.; Liu, J.-M.; Li, J.; Fang, H.C.; Li, H.P.; Ong, C.K. // Applied Physics A: Materials Science & Processing;1999, Vol. 68 Issue 5, p533 

    Abstract. The complete (001)-oriented thin films of La[sub 0.5]Sr[sub 0.5]CoO[sub 3-x] (LSCO) are deposited on (001) SrTiO[sub 3] substrates by pulsed laser deposition under reduced oxygen pressure. It is revealed that the c axis of the film stretches with depleting oxygen. The magnetic,...

  • Pulsed laser deposition of SBN:75 thin films with electro-optic coefficient of 844 pm/V. Tayebati, Parviz; Trivedi, Dhrupad; Tabat, Martin // Applied Physics Letters;8/19/1996, Vol. 69 Issue 8, p1023 

    In this letter we report on the pulsed laser epitaxial deposition of thin films of Sr0.75Ba0.25Nb2O6 on MgO substrates with measured diagonal Pockel’s coefficient r33=844 pm/V in these films. This is the largest linear electro-optic coefficient reported to date in a thin film material. In...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics