Lithography-modulated self-assembly of small ferroelectric Pb(Zr,Ti)O3 single crystals

Bühlmann, S.; Muralt, P.; Von Allmen, S.
April 2004
Applied Physics Letters;4/5/2004, Vol. 84 Issue 14, p2614
Academic Journal
Triangular (111) and square-shaped (100) Pb(Zr,Ti)O3 single crystallites with lateral dimensions down to 50 nm and thickness of 20 nm have been grown using lithography-modulated self-assembly in an in situ sputter process. Epitaxial (111)-oriented Pt on a SrTiO3 single crystal served as the substrate. An epitaxial 2 nm thick rutile TiO2 film was grown and patterned into 100–200 nm wide attachment sites by electron beam lithography. The perovskite nucleation density was 60 times higher on TiO2 seeds than on bare Pt(111). © 2004 American Institute of Physics.


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