Microfabricated alkali atom vapor cells

Liew, Li-Anne; Knappe, Svenja; Moreland, John; Robinson, Hugh; Hollberg, Leo; Kitching, John
April 2004
Applied Physics Letters;4/5/2004, Vol. 84 Issue 14, p2694
Academic Journal
We describe the fabrication of chip-sized alkali atom vapor cells using silicon micromachining and anodic bonding technology. Such cells may find use in highly miniaturized atomic frequency references or magnetometers. The cells consist of cavities etched in silicon, with internal volumes as small as 1 mm3. Two techniques for introducing cesium and a buffer gas into the cells are described: one based on chemical reaction between cesium chloride and barium azide, and the other based on direct injection of elemental cesium within a controlled anaerobic environment. Cesium optical absorption and coherent population trapping resonances were measured in the cells.


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