Liquid-tin-jet laser-plasma extreme ultraviolet generation

Jansson, P.A.C.; Hansson, B.A.M.; Hemberg, O.; Otendal, M.; Holmberg, A.; de Groot, J.; Hertz, H.M.
March 2004
Applied Physics Letters;3/29/2004, Vol. 84 Issue 13, p2256
Academic Journal
We demonstrate the applicability of liquid-metal jets in vacuum as regenerative targets for laser-plasma generation of extreme ultraviolet (EUV) and soft x-ray radiation. This extends the operation of liquid-jet laser-plasma sources to high-temperature, high-Z, high-density, low-vapor-pressure materials with new spectral signatures. The system is demonstrated using tin (Sn) as the target due to its strong emission around λ≈13 nm, which makes the material suitable for EUV lithography. We show a conversion efficiency of 2.5% into (2%BW×2π×sr) and report quantitative measurements of the ionic/atomic as well as particulate debris emission. © 2004 American Institute of Physics.


Related Articles

  • Debris characteristics of a laser-produced tin plasma for extreme ultraviolet source. Higashiguchi, Takeshi; Rajyaguru, Chirag; Dojyo, Naoto; Taniguchi, Yosuke; Sakita, Koji; Kubodera, Shoichi; Sasaki, Wataru // Review of Scientific Instruments;Dec2005, Vol. 76 Issue 12, p126102 

    We measured debris characteristics of a tin (Sn) plasma produced by a 10-ns infrared Nd:YAG laser. A maximum kinetic energy of 7 keV of tin ions was observed. Such suprathermal tin ions emitted from a solid planar target consisted of singly and doubly ionized tin ions. Both suprathermal ions and...

  • Creation of Nanostructures on Polymer Surfaces Irradiated with Extreme Ultraviolet Pulses. Bartnik, A.; Fiedorowicz, H.; Jarocki, R.; Kostecki, J.; Szczurek, A.; Szczurek, M. // Acta Physica Polonica, A.;Dec2009 Supplement, Vol. 116, pS.108 

    A laser-plasma extreme ultraviolet source equipped with grazing incidence and Mo/Si collectors was used for surface modification of selected polymers. Surface morphology after irradiation was investigated. Different forms of nanostructures were obtained depending on polymer and irradiation...

  • Anomalous absorption due to ion-acoustic decay instability in a large-scale plasma relevant to... Mizuno, K.; Young, P.E.; Estabrook, K. // Physics of Plasmas;Apr95, Vol. 2 Issue 4, p1023 

    Shows that the anomalous length of the laser light due to the ion-acoustic decay instability (IADI) can be much smaller than the instability width with a relatively weak laser intensity in a large-scale plasma. Sufficiency of an instability width of only a few laser wavelengths to absorb most...

  • Comment on 'Landau-fluid simulation of laser filamentation' [Phys. Plasmas 1, 1287 (1994)]. Maximov, A.V.; Silin, V.P. // Physics of Plasmas;Apr95, Vol. 2 Issue 4, p1355 

    Comments on the article 'Landau-fluid simulation of laser filamentation,' in the 1994 issue of the periodical 'Physics of Plasmas.' Approach to the theory of filamentation of laser radiation in plasmas as outlined in the paper of Kaider et al; Electron nonlocal heat conductivity used for...

  • Laser wavelength and spot diameter dependence of extreme ultraviolet conversion efficiency in ω, 2ω, and 3ω Nd:YAG laser-produced plasmas. Miyamoto, Shuji; Shimoura, Atushi; Amano, Sho; Fukugaki, Keisuke; Kinugasa, Hiroaki; Inoue, Takahiro; Mochizuki, Takayasu // Applied Physics Letters;6/27/2005, Vol. 86 Issue 26, p261502 

    Conversion efficiency and spectra of extreme ultraviolet radiations from a cryogenic planar solid xenon target were investigated as a function of laser wavelength (ω, 2ω, and 3ω Nd:YAG) and the laser focus spot size (50–700 μm) at the intensity 1010–5×1012 W/cm2....

  • Effect of inductive-plasma UV preionization on the parameters of XeCl laser radiation. Fedorov, A. I. // Technical Physics Letters;Aug2007, Vol. 33 Issue 8, p678 

    A XeCl laser with a double plasma electrode providing automated inductive-plasma UV preionization has been experimentally studied. Ways to increase the laser efficiency by selecting a proper regime of excitation of the active medium based on various buffer gases (helium, argon, and neon) are...

  • Advanced properties of extended plasmas for efficient high-order harmonic generation. Ganeev, R. A.; Suzuki, M.; Kuroda, H. // Physics of Plasmas;May2014, Vol. 21 Issue 5, p053503-1 

    We demonstrate the advanced properties of extended plasma plumes (5 mm) for efficient harmonic generation of laser radiation compared with the short lengths of plasmas (~0.3-0.5 mm) used in previous studies. The harmonic conversion efficiency quadratically increased with the growth of plasma...

  • Extreme ultraviolet emission from dense plasmas generated with sub-10-fs laser pulses. Osterholz, J.; Brandl, F.; Cerchez, M.; Fischer, T.; Hemmers, D.; Hidding, B.; Pipahl, A.; Pretzler, G.; Rose, S. J.; Willi, O. // Physics of Plasmas;Oct2008, Vol. 15 Issue 10, p103301 

    The extreme ultraviolet (XUV) emission from dense plasmas generated with sub-10-fs laser pulses with varying peak intensities up to 3×1016 W/cm2 is investigated for different target materials. K shell spectra are obtained from low Z targets (carbon and boron nitride). In the spectra, a...

  • Cylindrical plasmas generated by an annular beam of ultraviolet light. Thomas, D. M.; Allen, J. E. // Physics of Plasmas;2015, Vol. 22 Issue 7, p1 

    We investigate a cylindrical plasma system with ionization, by an annular beam of ultraviolet light, taking place only in the cylinder's outer region. In the steady state, both the outer and inner regions contain a plasma, with that in the inner region being uniform and field-free. At the...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics