TITLE

Super-resolution in laser annealing and ablation

AUTHOR(S)
Avrutsky, Ivan; Georgiev, Daniel G.; Frankstein, Dmitry; Auner, Gregory; Newaz, Golam
PUB. DATE
March 2004
SOURCE
Applied Physics Letters;3/29/2004, Vol. 84 Issue 13, p2391
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
This letter reports observation of ablated holes as small as 0.7 μm fabricated by single 25 ns pulses of KrF (λ=248 nm) laser focused onto a 5.6 μm spot. Samples with high thermal conductivity films with respect to that of the substrate (Si/silica, Al/glass) repeatedly showed considerable reduction in the size of the ablated spot (0.7- and 1.2-μm-diam holes, respectively). This letter also presents a likely mechanism of the observed super-resolution and the criteria necessary to achieve super-resolution. Due to the nonoptical origin of this effect it is expected that a tightly focused (<0.5 μm) laser beam can be used to ablate with nanoscale (<100 nm) resolution. © 2004 American Institute of Physics.
ACCESSION #
12606836

 

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