TITLE

ITZO (In-Sn-Zn-O) 박막의 전기적 및 광학적 특성의 두께 의존성

AUTHOR(S)
강성준; 정양희
PUB. DATE
July 2017
SOURCE
Journal of the Korea Institute of Information & Communication En;Jul2017, Vol. 21 Issue 7, p1285
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We prepared ITZO thin films with various thicknesses on glass substrates using RF magnetron sputtering and investigated electrical, optical and structural properties of the thin film. Sheet resistance of ITZO thin film showed a decreasing trend on the increase of film thickness, but its resistivity exhibited a substantially constant value of 5.06±1.23×10-4 Ω-cm. Transmittance of ITZO thin film moved to the long-wavelength with the increase of film thickness. Figure of merit in a visible light and an absorption area of P3HT:PCBM organic active layer of the 360nm-thick IZTO thin film was 8.21×10-3 Ω-1 and 9.29×10-3 Ω-1, respectively. Through XRD and AFM measurements, it was confirmed that all the ITZO thin films have amorphous structure and the surface roughness of films are very smooth in the range of 0.561 to 0.263 nm. In this study, it was found that amorphous ITZO thin film is a very promising material for organic solar cell.
ACCESSION #
125498831

 

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