Near-field optical nanopatterning of crystalline silicon

Wysocki, G.; Heitz, J.; Bäuerle, D.
March 2004
Applied Physics Letters;3/22/2004, Vol. 84 Issue 12, p2025
Academic Journal
Nanoscale photochemical and photophysical etching of Si in Cl[sub 2] atmosphere is demonstrated by means of an optical near-field setup. With 351 nm Ar[sup +]-laser radiation and low intensities, the etching mechanism is purely photochemical. In this regime, the width of patterns—which is about 115 nm at full width at half maximum (FWHM)—corresponds, approximately, to the diameter of the fiber tip. The vertical etch rate is of the order of 1 nm/s. With 514.5 nm Ar[sup +]-laser light etching is observed only at significantly higher laser-light intensities. Patterns with width down to about 30 nm at FWHM have been achieved. Here, the lateral resolution corresponds to about 1/18 of the laser wavelength employed. © 2004 American Institute of Physics.


Related Articles

  • Optical near-field distribution in an asymmetrically illuminated tip–sample system for laser/STM nanopatterning. Wang, Z.B.; Luk'yanchuk, B.S.; Li, L.; Crouse, P.L.; Liu, Z.; Dearden, G.; Watkins, K.G. // Applied Physics A: Materials Science & Processing;Nov2007, Vol. 89 Issue 2, p363 

    In surface nano-patterning using an atomic force microscope (AFM) tip in scanning tunnelling microscopy (STM) mode and illuminated by a laser, two controversial physical mechanisms exist in the literature: the field-enhancement (FE) model and the thermal-induced mechanical contact (TMC) model....

  • A double lamellae dropoff etching procedure for tungsten tips attached to tuning fork atomic force microscopy/scanning tunneling microscopy sensors. Kulawik, M.; Nowicki, M.; Thielsch, G.; Cramer, L.; Rust, H.-P.; Freund, H.-J.; Pearl, T. P.; Weiss, P. S. // Review of Scientific Instruments;Feb2003, Vol. 74 Issue 2, p1027 

    We present an electrochemical etching scheme for producing sharp tungsten tips for use in scanning probe microscopes. The motivation behind the development of this particular method comes from the need to have an etched probe attached to a quartz tuning fork. Comparisons with existing etching...

  • MORPHOLOGY AND STRUCTURE OF BRIGHT ELECTRODEPOSITED METAL COATINGS. Pavlović, Miomir G.; Pavlović, Ljubica J. // Macedonian Journal of Chemistry & Chemical Engineering;2011, Vol. 30 Issue 1, p29 

    The properties which determine whether the metal surface is mirror bright are precisely determined by scanning electron microscopy (SEM), atomic forces microscopy (AFM), scanning tunneling microscopy (STM) and relectance spectrophotometry investigations. Mirror brightness of metal surfaces can...

  • A variable-temperature nanostencil compatible with a low-temperature scanning tunneling microscope/atomic force microscope. Steurer, Wolfram; Gross, Leo; Schlittler, Reto R.; Meyer, Gerhard // Review of Scientific Instruments;2014, Vol. 85 Issue 2, p1 

    We describe a nanostencil lithography tool capable of operating at variable temperatures down to 30 K. The setup is compatible with a combined low-temperature scanning tunneling microscope/atomic force microscope located within the same ultra-high-vacuum apparatus. The lateral movement...

  • Ultrafast-laser-induced parallel phase-change nanolithography. Lin, Y.; Hong, M. H.; Chong, T. C.; Lim, C. S.; Chen, G. X.; Tan, L. S.; Wang, Z. B.; Shi, L. P. // Applied Physics Letters;7/24/2006, Vol. 89 Issue 4, p041108 

    A phase-change nanolithography technique is developed to fabricate up to millions of two-/three-dimensional nanostructures (∼50 nm) over a large area at a high speed by combining femtosecond laser, microlens array, and wet etching process. Near-field scanning optical microscopy, electrical...

  • Melting of carbon heated by focused laser radiation in air at atmospheric pressure and temperature below 4000 K. Abramov, D.; Arakelyan, S.; Galkin, A.; Kvacheva, L.; Klimovskiĭ, I.; Kononov, M.; Mikhalitsyn, L.; Kucherik, A.; Prokoshev, V.; Savranskiĭ, V. // JETP Letters;11/1/2006, Vol. 84 Issue 5, p258 

    The melting of carbon at a pressure of about 1 atm is observed. The escape of liquid carbon from the heating region and its spread over the sample surface are observed in the experiments. The structural changes in graphite occurring in the melting region are determined from scanning tunneling...

  • Wavelength dependence of the magnetic resolution of the magneto-optical near-field scanning tunneling microscope. Schad, R.; Jordan, S. M.; Stoelinga, M. J. P.; Prins, M. W. J.; Groeneveld, R. H. M.; van Kempen, H.; van Kesteren, H. W. // Applied Physics Letters;11/2/1998, Vol. 73 Issue 18 

    A magneto-optical near-field scanning tunneling microscope is used to image the prewritten magnetic domain structure of a Pt/Co multilayer. A semiconducting tip acts as a local photodetector to measure the magnetic circular dichroism signal coming from the magnetic sample. The resolution of the...

  • Atomic point-contact imaging. Smith, D. P. E.; Binnig, G.; Quate, C. F. // Applied Physics Letters;11/3/1986, Vol. 49 Issue 18, p1166 

    In tunneling microscopy a potential barrier separates a pointed tip from the sample to be investigated. In this letter we show that atomic resolution can be achieved in special cases where the gap spacing has been reduced to the point where the potential barrier may have completely collapsed. In...

  • An integrated scanning tunneling, atomic force and lateral force microscope. Wenzler, L. A.; Han, T.; Bryner, R. S.; Beebe, T. P. // Review of Scientific Instruments;Jan1994, Vol. 65 Issue 1, p85 

    We describe the design and operation of a combined scanning tunneling–atomic force–lateral force microscope [(STM), (AFM), (LFM)]. Including these capabilities in a single instrument reduces construction costs and increases flexibility. AFM and LFM may be performed simultaneously;...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics