Controlling energy dissipation and stability of micromechanical silicon resonators with self-assembled monolayers

Henry, Joshua A.; Wang, Yu; Hines, Melissa A.
March 2004
Applied Physics Letters;3/8/2004, Vol. 84 Issue 10, p1765
Academic Journal
Self-assembled alkyl monolayers that are directly tethered to the silicon surface with a Si–C bond suppress mechanical energy dissipation in megahertz-range micromechanical silicon oscillators as compared to the more common silicon oxide coating. Although not as low loss as freshly prepared H-terminated surfaces, Si–C tethered monolayers are more stable with time. Alkyl monolayers derived from chlorosilanes have much poorer mechanical performance. Both types of monolayers suppress adsorption. © 2004 American Institute of Physics.


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