TITLE

Fuzzy CDs: Show me the edges!

AUTHOR(S)
Ford, Arnie
PUB. DATE
February 2004
SOURCE
Microlithography World;Feb2004, Vol. 13 Issue 1, p22
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Presents a study that examines the correlation between in-line contrast detail-scanning electron microscopy (CD-SEM) and cross-section SEM. Problems with measuring cross sections; Results and discussion; Conclusion.
ACCESSION #
12384089

 

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