TITLE

The Rayleigh depth of focus

AUTHOR(S)
Mack, Chris A.
PUB. DATE
February 2004
SOURCE
Microlithography World;Feb2004, Vol. 13 Issue 1, p14
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Focuses on the derivation of the Rayleigh criteria for resolution and depth of focus and how it can be extended to high numerical apertures and immersion lithography. Definition of depth of focus; Determination of the effect of defocus on an image; Derivation formula.
ACCESSION #
12384071

 

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