The Rayleigh depth of focus

Mack, Chris A.
February 2004
Microlithography World;Feb2004, Vol. 13 Issue 1, p14
Trade Publication
Focuses on the derivation of the Rayleigh criteria for resolution and depth of focus and how it can be extended to high numerical apertures and immersion lithography. Definition of depth of focus; Determination of the effect of defocus on an image; Derivation formula.


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