Product-wafer focus-exposure monitor for advanced flash memory

Hannon, Sean; Kennemer, Harold; Monahan, Kevin; Eichelberger, Brad
February 2004
Microlithography World;Feb2004, Vol. 13 Issue 1, p5
Trade Publication
Discusses the use of product-wafer focus-exposure monitor in lithography. Components of edge-placement error; Development of product-wafer focus-exposure monitors; Benefits from product-wafer monitors.


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