Radio frequency potential of inductive plasma immersed in a weak magnetic field

Godyak, V.A.; Alexandrovich, B.M.
March 2004
Applied Physics Letters;3/1/2004, Vol. 84 Issue 9, p1468
Academic Journal
Radio frequency potential has been revealed in inductively coupled plasma (ICP) immersed in a weak magnetic field. The rf plasma potential measured in a wide range of driving frequency and argon pressure reached tens of volts at a relatively weak magnetic field and was found falling with an increase in the driving frequency and gas pressure. The appearance of rf plasma potential in magnetized ICP is interpreted as a result of rf Hall effect caused by the electron rf drift in a crossed magnetic field. © 2004 American Institute of Physics.


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