Ruthenium films by digital chemical vapor deposition: Selectivity, nanostructure, and work function

Dey, Sandwip K.; Goswami, Jaydeb; Diefeng Gu, Jaydeb; Henk de Waard, Jaydeb; Marcus, Steve; Werkhoven, Chris
March 2004
Applied Physics Letters;3/1/2004, Vol. 84 Issue 9, p1606
Academic Journal
Ruthenium electrodes were selectively deposited on photoresist-patterned HfO[sub 2] surface [deposited on a SiO[sub x]/Si wafer by atomic layer deposition (ALD)] by a manufacturable, digital chemical vapor deposition (DCVD) technique. DCVD of Ru was carried out at 280–320 °C using an alternate delivery of Bis (2,2,6,6-tetramethyl-3,5-heptanedionato)(1,5-cyclooctadiene)Ru (dissolved in tetrahydrofuran) and oxygen. The as-deposited Ru films were polycrystalline, dense, and conducting (resistivity ∼20.6 μΩ cm). However, Rutherford backscattering spectroscopy, x-ray photoelectron spectroscopy, and high-resolution electron microscopy results indicate the presence of an amorphous RuO[sub x] at the Ru grain boundaries and at the DCVD–Ru/ALD–HfO[sub 2] interface. The estimated work function of DCVD–Ru on ALD–HfO[sub 2] was ∼5.1 eV. Moreover, the equivalent oxide thickness, hysteresis in capacitance–voltage, and leakage current density at -2 V of the HfO[sub 2]/SiO[sub x] dielectric, after forming gas (95% N[sub 2]+5% H[sub 2]) annealing at 450 °C for 30 min, were 1.4 nm, 20 mV, and 7.4×10[sup -7] A cm[sup -2], respectively. © 2004 American Institute of Physics.


Related Articles

  • Directed assembly of carbon nanotube electronic circuits. Wei, Y. Y.; Wei, Y.Y.; Eres, Gyula // Applied Physics Letters;6/19/2000, Vol. 76 Issue 25 

    We report on a method for directed assembly of integrated carbon nanotube circuits using selective area chemical vapor deposition on prepatterned catalyst electrodes. The circuits consist of a multiwall carbon nanotube bridging a pair of electrodes, forming a metal/carbon nanotube/metal...

  • Pt-polyaniline nanocomposite on boron-doped diamond electrode for amperometic biosensor with low detection limit. Min-Jung Song; Jong Hoon Kim; Seung Koo Lee; Jae-Hyun Lee; Dae Soon Lim; Sung Woo Hwang; Dongmok Whang // Microchimica Acta;Dec2010, Vol. 171 Issue 3/4, p249 

    Boron-doped diamond electrodes covered with a nanostructured Pt nanoparticle-polyaniline composite have been fabricated and employed as sensitive amperometric sensors with low detection limit. A highly conductive boron-doped diamond thin film (BDD) was prepared by chemical vapor deposition, and...

  • Synthesis and electronic transport studies of CdO nanoneedles. Liu, Xiaolei; Li, Chao; Han, Song; Han, Jie; Zhou, Chongwu // Applied Physics Letters;3/24/2003, Vol. 82 Issue 12, p1950 

    Single-crystalline, needle-shaped CdO nanostructures were synthesized using a chemical vapor deposition method and characterized using a variety of techniques. Devices consisting of individual CdO nanoneedles were fabricated and high conductance as well as high carrier concentrations was...

  • Comparison study of semi-crystalline and highly crystalline multiwalled carbon nanotubes. Endo, M.; Kim, Y. A.; Fukai, Y.; Hayashi, T.; Terrones, M.; Terrones, H.; Dresselhaus, M. S. // Applied Physics Letters;9/3/2001, Vol. 79 Issue 10 

    Very different types of straight and long multiwalled carbon nanotubes, ranging from semi-crystalline to highly crystalline, are obtained using a floating reactant method, by merely changing the flow rate of the carrier gas. Graphitization behaviors of these nanotubes are studied comparatively...

  • Existence of extinction temperature in WSi[sub x] film growth from WF[sub 6] and SiH[sub 4]: An.... Saito, T.; Shimogaki, Y.; Egashira, Y.; Komiyama, H.; Yuyama, Y.; Sugawara, K.; Nagata, S.; Takahiro, K.; Yamaguchi, S. // Applied Physics Letters;4/5/1993, Vol. 62 Issue 14, p1606 

    Reports the existence of an extinction temperature in WSi[sub x] film growth from WF[sub 6] and SiH[sub 4]. Indication of domination by radical chain reactions in gas phase; Decrease of deposition rate at an extinction temperature; Use of low pressure chemical vapor deposition.

  • Large-scale well aligned carbon nitride nanotube films: Low temperature growth and electron field emission. Zhong, Dingyong; Liu, Shuang; Zhang, Guangyu; Wang, E. G. // Journal of Applied Physics;6/1/2001, Vol. 89 Issue 11, p5939 

    Large-scale well aligned carbon nitride nanotube films (6 cm in diameter), which are easily processed and show potential for nanomanipulation, have been synthesized by microwave plasma enhanced chemical vapor deposition at a relatively low temperature of 550 °C. The characterization, using...

  • Ultraviolet spectroscopy of gaseous species in a hot filament diamond deposition system when C2H2 and H2 are the input gases. Toyoda, H.; Childs, M. A.; Menningen, K. L.; Anderson, L. W.; Lawler, J. E. // Journal of Applied Physics;3/15/1994, Vol. 75 Issue 6, p3142 

    Discusses a study which measured the methyl radical density, acetylene mole fraction, filament properties and diamond growth rate and film quality in a hot filament chemical vapor deposition (CVD) system when carbon[sub2] hydrogen[sub2] and hydrogen[sub2] are used as input gases. Schematic...

  • Synthesis of thin silicon nanowires using gold-catalyzed chemical vapor deposition. Sharma, S.; Kamins, T.I.; Williams, R. Stanley // Applied Physics A: Materials Science & Processing;Mar2005, Vol. 80 Issue 6, p1225 

    Silicon nanowires were synthesized using chemical vapor deposition catalyzed by gold nanoparticles deposited on silicon substrates. Silicon nanowires grew epitaxially in <111> directions on (100)-oriented silicon substrates. For a particular set of process parameters, we observed a critical...

  • Dc plasma-enhanced chemical vapour deposition growth of carbon nanotubes and nanofibres: in situ spectroscopy and plasma current dependence. Jönsson, M.; Nerushev, O. A.; Campbell, E. E. B. // Applied Physics A: Materials Science & Processing;Aug2007, Vol. 88 Issue 2, p261 

    Dc plasma-enhanced CVD growth of nanotubes and nanofibres is studied as a function of plasma power (3–40 W). The dependence of the nanotube/nanofibre morphology for growth on thin iron films and lithographically prepared individual nickel dots is investigated. In both cases, large...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics