Strain-tunable silicon photonic band gap microcavities in optical waveguides

Chee Wei Wong, Andrea Marco; Rakich, Peter T.; Johnson, Steven G.; Minghao Qi, Steven G.; Smith, Henry I.; Yongbae Jeon, Henry I.; Barbastathis, George; Sang-Gook Kim, George; Ippen, Erich P.; Kimerling, Lionel C.
February 2004
Applied Physics Letters;2/23/2004, Vol. 84 Issue 8, p1242
Academic Journal
We report the design, device fabrication, and measurements of tunable silicon photonic band gap microcavities in optical waveguides, using direct application of piezoelectric-induced strain to the photonic crystal. We show, through first-order perturbation computations and experimental measurements, a 1.54 nm shift in cavity resonances at 1.56 μm wavelengths for an applied strain of 0.04%. The strain is applied through integrated piezoelectric microactuators. For operation at infrared wavelengths, we combine x-ray and electron-beam lithography with thin-film piezoelectric processing. This level of integration permits realizable silicon-based photonic chip devices, such as high-density optical filters, with active reconfiguration. © 2004 American Institute of Physics.


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