Enhanced formation of luminescent nanocrystal Si embedded in Si/SiO[sub 2] superlattice by excimer laser irradiation

Daigil Cha, R.; Shin, Jung H.; In-Hyuk Song; Min-Koo Han
February 2004
Applied Physics Letters;2/23/2004, Vol. 84 Issue 8, p1287
Academic Journal
The effect of excimer laser annealing on the formation of luminescent nanocrystal Si (nc-Si) embedded in Si/SiO[sub 2] superlattice is investigated. An amorphous Si/SiO[sub 2] superlattice consisting of 20 periods of 2 nm thin Si layers and 5 nm thin SiO[sub 2] layers was deposited on Si using electron cyclotron resonance plasma-enhanced chemical vapor deposition. Excimer laser annealing alone did not result in any nc-Si luminescence even at an energy density sufficient to melt the Si layers. However, if the nc-Si is preformed by a thermal anneal, subsequent excimer laser annealing will result in a threefold increase of the nc-Si luminescence intensity. The temperature dependence of the nc-Si luminescence spectrum, lifetime, and intensity indicates that excimer laser annealing activates luminescent nc-Si by removing defects and amorphous regions in thermally crystallized Si layers without significant changes in the size or shape of nc-Si. © 2004 American Institute of Physics.


Related Articles

  • Whiskerlike structure growth on silicon exposed to ArF excimer laser irradiation. Sa´nchez, F.; Morenza, J. L.; Aguiar, R.; Delgado, J. C.; Varela, M. // Applied Physics Letters;7/29/1996, Vol. 69 Issue 5, p620 

    The effects of ArF excimer laser irradiation on silicon single crystals in air have been studied. The etch rate versus fluence curve shows three well defined zones, with very different etch rates and dependences. In the intermediate zone (from 1.5 to 2.5 J/cm2), narrow (1–2 μm...

  • Self-organized silicon microcolumn arrays generated by pulsed laser irradiation. Pedraza, A.J.; Fowlkes, J.D.; Lowndes, D.H. // Applied Physics A: Materials Science & Processing;1999, Vol. 69 Issue 7, pS731 

    Abstract. Cumulative nanosecond pulsed excimer laser irradiation of silicon produces an array of high-aspect-ratio microcolumns that protrude well above the initial surface. The growth of these microcolumns is strongly affected by the gas environment, being enhanced in air or in other...

  • Dynamics of the hydrodynamical growth of columns on silicon exposed to ArF excimer-laser irradiation. Sánchez, F.; Morenza, J.L.; Aguiar, R.; Delgado, J.C.; Varela, M. // Applied Physics A: Materials Science & Processing;1998, Vol. 66 Issue 1, p83 

    Abstract. We present new results about the development of the whiskerlike structures that grow on silicon single crystals exposed in air to ArF excimer-laser irradiation. Small depressions appear on the surface after 100-200 laser pulses. With the next pulses, the size of these depressions...

  • Solid phase phosphorous activation in implanted silicon by excimer laser irradiation. Fisicaro, G.; Italia, M.; Privitera, V.; Piccitto, G.; Huet, K.; Venturini, J.; La Magna, A. // Journal of Applied Physics;Jun2011, Vol. 109 Issue 11, p113513 

    The activation mechanism in phosphorous implanted silicon under excimer laser irradiation is investigated. The activation efficiency in the solid phase has been measured in a wide range of irradiation conditions, tuning the laser fluence in the sub-, partial, and total melting regime. Moreover,...

  • SILICON SURFACE STRUCTURING BY XeCl EXCIMER LASER IRRADIATION IN ATMOSPHERIC CONDITIONS. SAVA, V.; MITRAN, T. L.; SOCOL, G.; ANTOHE, S. // Digest Journal of Nanomaterials & Biostructures (DJNB);Jan-Mar2013, Vol. 8 Issue 1, p61 

    Surface structuring of silicon wafers has been done by irradiation with a XeCl (λ= 308 nm, τFWHM = 20 ns) excimer laser source in air at room and 100°C temperature, respectively. Control of the surface texturization has been performed by variation of pulses number at the same laser...

  • Outstanding Meeting Paper: Light absorptive underlayer enhanced excimer-laser crystallization of Si thin-film. Wenchang Yeh; Dunyuan Ke; Chunjun Zhuang; Hsiangen Huang; Yubang Yang // Journal of Materials Research;Nov2007, Vol. 22 Issue 11, p16 

    A sample structure and method for superlateral-growth (SLG) enhancement in excimer-laser crystallization has been implemented and realized. The proposed sample structure is a Si film/buffer film/light-absorptive (LA) film/glass-stacked structure, with the irradiation of laser light from...

  • Crystallization and optical nonlinearity in GeO[sub 2]-SiO[sub 2] glass poled with ArF excimer-laser irradiation. Matsumoto, Syuji; Fujiwara, Takumi; Seno, Yoshiki; Hirose, Yosiharu; Ohama, Motoshi; Ikushima, Akira J. // Journal of Applied Physics;12/15/2000, Vol. 88 Issue 12 

    We report on crystallization and second- and third-order optical nonlinearities of GeO[sub 2]-SiO[sub 2] glass poled with ArF laser irradiation. With laser power and 100 mJ/cm2/pulse, the treatment generates crystallites in the glass, provided that the poling field strength is greater than...

  • Role of light scattering in excimer laser annealing of Si. La Magna, Antonino; Alippi, Paola; Privitera, Vittorio; Fortunato, Guglielmo // Applied Physics Letters;4/18/2005, Vol. 86 Issue 16, p161905 

    We have studied, by means of simulations and experiments, the interaction between the electromagnetic field, generated by excimer laser, and Si device. This study strictly refers to laser annealing process, recently attracting a broad interest as an alternative thermal treatment. Our numerical...

  • Excimer laser enhanced nitridation of silicon substrates. Sugii, Toshihiro; Ito, Takashi; Ishikawa, Hajime // Applied Physics Letters;1984, Vol. 45 Issue 9, p966 

    Silicon direct nitridation has been successfully done using purified ammonia gas and an ArF excimer laser (λ=193 nm). Direct nitride films were grown at a substrate temperature of 400 °C and a laser pulse energy of 15 mJ/pulse cm2. As far as Auger signal intensities are concerned, there is...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics