Multimode and multifrequency gigahertz surface acoustic wave sensors

Seidel, Werner; Hesjedal, Thorsten
February 2004
Applied Physics Letters;2/23/2004, Vol. 84 Issue 8, p1407
Academic Journal
A simple surface acoustic wave sensor system is presented that combines the advantages of multifrequency/multimode operation and GHz frequencies in a single acoustic device structure. Analyzing multiple frequencies and modes is the basis for the multicomponent analysis of gases and liquids. The sensor system is based on floating electrode unidirectional transducers that allow efficient excitation of two modes and up to 48 harmonics (or 5 GHz). It can be fabricated without the need of costly nanofabrication techniques. Higher sensor frequencies are advantageous as the sensitivity increases with the frequency. We tested the basic operation of our sensor system by applying it to humidity sensing without a sensitive layer. © 2004 American Institute of Physics.


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