Nanometrics Combines Ellipsometry, Reflectrometry

September 2003
Electronic News;9/8/2003, Vol. 49 Issue 36, pN.PAG
Trade Publication
Deals with the integrated metrology tool unveiled by Nanometrics Inc. in September 2003 combining ultraviolet spectroscopic ellipsometry and deep ultraviolet (DUV) spectroscopic reflectometry. Range of applications for the combined metrology capability of the tool; Benefits of the DUV technology in the dielectric chemical mechanical planarization process; Features of the NanoOCD/DUV 9010 tool.


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