Intel Grants Cymer $20M in EUV Funding

February 2004
Electronic News;2/2/2004, Vol. 50 Issue 5, pN.PAG
Trade Publication
Reports on the funding granted by Intel Corp. to Cymer Inc. to accelerate development of extreme ultraviolet (EUV) lithography light sources. Value of the funding; Issue that needs to be addressed with regard to EUV lithography; Significance of the agreement between the two companies, according to Peter Silverman, director of Intel lithography capital equipment development.


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