TITLE

Intel Grants Cymer $20M in EUV Funding

PUB. DATE
February 2004
SOURCE
Electronic News;2/2/2004, Vol. 50 Issue 5, pN.PAG
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Reports on the funding granted by Intel Corp. to Cymer Inc. to accelerate development of extreme ultraviolet (EUV) lithography light sources. Value of the funding; Issue that needs to be addressed with regard to EUV lithography; Significance of the agreement between the two companies, according to Peter Silverman, director of Intel lithography capital equipment development.
ACCESSION #
12240470

 

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