Characteristics of single crystal “thin film” capacitor structures made using a focused ion beam microscope

Saad, M.M.; Bowman, R.M.; Gregg, J.M.
February 2004
Applied Physics Letters;2/16/2004, Vol. 84 Issue 7, p1159
Academic Journal
The focused ion beam microscope was used to isolate thin parallel-sided lamellae from single crystals of BaTiO[sub 3] and SrTiO[sub 3]. Damage and ion-implantation on the faces of the lamellae were observed, but could be removed by thermal annealing. A series of lamellae ranging in thickness from ∼660 to ∼300 nm were made from a SrTiO[sub 3] single crystal, and after thermal annealing, gold electrodes were deposited on either side to form parallel-plate capacitor structures. The room temperature functional properties of these single crystal “thin film” capacitors were investigated. Although space-charge artifacts dominated the low frequency response, above 10 kHz, examination of the change in capacitance as a function of lamellar thickness allowed the room temperature relative dielectric constant to be meaningfully extracted. This was found to be ∼300, as is the case in bulk. For these single crystal lamellae there was therefore no evidence of a collapse in dielectric constant associated with thin film dimensions. © 2004 American Institute of Physics.


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