Study on the strength and elongation of free-standing Al beams for microelectromechanical systems applications

Hoo-Jeong Lee; Ping Zhang; Bravman, John C.
February 2004
Applied Physics Letters;2/9/2004, Vol. 84 Issue 6, p915
Academic Journal
This letter reports a study on the strength and elongation of Al in the form of micrometer-scale, free-standing beams. We fabricated microtensile specimens of Al beams by using a simple micromachining process and carried out uniaxial tensile tests in a mechanical test system with a piezoelectric actuator that controls the displacement as small as a few nanometers. The results of the tests suggest that, if the grain size remains the same, the yield strength does not change with the thickness whereas the elongation varies with it very sensitively. In addition, the yield strength of the Al beams is found to be much smaller than that of Al films bonded onto Si substrates but somewhat larger than that of the bulk Al estimated for a comparable grain size from the Hall–Petch relation. © 2004 American Institute of Physics.


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