TITLE

Nanometrics Supplies Ebara with CMP Metrology

PUB. DATE
January 2004
SOURCE
Electronic News;1/19/2004, Vol. 50 Issue 3, pN.PAG
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Reports on the contract awarded by Ebara Corp. to Nanometrics Inc. Metrology equipment to be supplied by Nanometrics to Ebara; Growth in the integrated metrology market.
ACCESSION #
12103059

 

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