TITLE

Intense blue–white luminescence from carbon-doped silicon-rich silicon oxide

AUTHOR(S)
Se-Young Seo; Kwan-Sik Cho, J. F.; Shin, Jung H.
PUB. DATE
February 2004
SOURCE
Applied Physics Letters;2/2/2004, Vol. 84 Issue 5, p717
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The effect of carbon doping on the enhancement of visible luminescence from silicon-rich silicon oxide (SRSO), which consists of Si nanoclusters embedded inside a SiO[sub 2] matrix, is investigated. C-doped SRSO films were fabricated by electron cyclotron resonance-plasma enhanced chemical vapor deposition method using SiH[sub 4], O[sub 2], and CH[sub 4] source gases followed by a high-temperature anneal. Intense blue-white visible luminescence, visible to the naked eye under daylight conditions, was observed from the film with a nearly equal amount of C and excess Si (∼16 at. %) after an anneal at 950 °C. Furthermore luminescence could be tuned from 1.8 to 2.5 eV by controlling the C to excess Si ratio, the C content, and the anneal temperature. Taken together with the infrared absorption spectra, these results indicate that the luminescence is attributed to exciton recombination in C-incorporated Si nanoclusters. © 2004 American Institute of Physics.
ACCESSION #
12063219

 

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