TITLE

Determination of secondary electron yield from insulators due to a low-kV electron beam

AUTHOR(S)
Yong, Y.C.; Thong, J.T.L.
PUB. DATE
October 1998
SOURCE
Journal of Applied Physics;10/15/1998, Vol. 84 Issue 8, p4543
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a study which examined a technique for the accurate determination of secondary electron (SE) yield of insulators due to low-kV electron beam. Methodology used to conduct the study; Information on the energy dependence of SE emission from silicon dioxide; Details on the dependence of SE emission from SIO2 on surface topography; Findings of the study.
ACCESSION #
1206196

 

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