Development of surface-wave ion source using coaxial-type cavity

Yoshida, Yoshikazu; Miyazawa, Toshikazu; Kazama, Atsushi
January 1997
Review of Scientific Instruments;Jan1997, Vol. 68 Issue 1, p79
Academic Journal
Reports that a compact 2.45 GHz surface-wave ion source has been developed for the production of stable beams from gaseous feed materials. Operation of the source with two different geometries of surface wave generation, including a dielectric disk on ground plane structure and a dielectric disk between the parallel plate structure with a holey top plate; Control of the intensity of the emitted microwave by varying the thickness of the dielectric plate; Use of three different thicknesses of the dielectric plate.


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