Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties

Kurek, Maksymilian; Larsen, Frederik K.; Larsen, Peter E.; Schmid, Silvan; Boisen, Anja; Keller, Stephan S.
July 2016
Sensors (14248220);Jul2016, Vol. 16 Issue 7, p1097
Academic Journal
Micro- and nanomechanical string resonators, which essentially are highly stressed bridges, are of particular interest for micro- and nanomechanical sensing because they exhibit resonant behavior with exceptionally high quality factors. Here, we fabricated and characterized nanomechanical pyrolytic carbon resonators (strings and cantilevers) obtained through pyrolysis of photoresist precursors. The developed fabrication process consists of only three processing steps: photolithography, dry etching and pyrolysis. Two different fabrication strategies with two different photoresists, namely SU-8 2005 (negative) and AZ 5214e (positive), were compared. The resonant behavior of the pyrolytic resonators was characterized at room temperature and in high vacuum using a laser Doppler vibrometer. The experimental data was used to estimate the Young’s modulus of pyrolytic carbon and the tensile stress in the string resonators. The Young’s moduli were calculated to be 74 ± 8 GPa with SU-8 and 115 ± 8 GPa with AZ 5214e as the precursor. The tensile stress in the string resonators was 33 ± 7 MPa with AZ 5214e as the precursor. The string resonators displayed maximal quality factor values of up to 3000 for 525-µm-long structures.


Related Articles

  • Tunable Micro- and Nanomechanical Resonators. Wen-Ming Zhang; Kai-Ming Hu; Zhi-Ke Peng; Guang Meng // Sensors (14248220);Oct2015, Vol. 15 Issue 10, p26478 

    Advances in micro- and nanofabrication technologies have enabled the development of novel micro- and nanomechanical resonators which have attracted significant attention due to their fascinating physical properties and growing potential applications. In this review, we have presented a brief...

  • Carbon nanotube resonators with capacitive and piezoresistive current modulation readout. Lee, Shih-Wei; Truax, Stuart; Yu, Liu; Roman, Cosmin; Hierold, Christofer // Applied Physics Letters;7/15/2013, Vol. 103 Issue 3, p033117 

    In this work, a single-walled carbon nanotube (SWCNT) nanomechanical resonator is characterized at mechanical resonance using both capacitive modulation and piezoresistive modulation effects. The piezoresistive modulation effect is shown to be a robust method for measuring the resonant response,...

  • Femtogram scale nanomechanical resonators embedded in a double-slot photonic crystal nanobeam cavity. He Zhang; Cheng Zeng; Daigao Chen; Miaofeng Li; Yi Wang; Qingzhong Huang; Xi Xiao; Jinsong Xia // Applied Physics Letters;2/1/2016, Vol. 108 Issue 5, p1 

    An optomechanical device that contains a nanomechanical resonator with an ultralow effective mass of 6.42 fg is designed and demonstrated. The femtogram scale nanomechanical resonator is embedded in a double-slot photonic crystal nanobeam cavity. Optical resonance provides efficient readout of...

  • High frequency carbon nanomechanical resonators embedded with carbon nanotube stiffening layers. Lee, Seung Hoon; Min, Bumki; Lee, Seung S.; Park, Se Il; Lee, Kwang-Cheol // Applied Physics Letters;11/1/2010, Vol. 97 Issue 18, p183108 

    We present batch-fabricated carbon-based nanomechanical resonators which are laminated by a pyrolyzed carbon layer and single-walled carbon-nanotube network (C/CNT resonators). The embedded CNT layers simultaneously enhance the electrical conductivity (∼160-fold) and mechanical stiffness...

  • Spring constant and damping constant tuning of nanomechanical resonators using a single-electron transistor. Schwab, K. // Applied Physics Letters;2/18/2002, Vol. 80 Issue 7, p1276 

    By fabricating a single-electron transistor onto a mechanical system in a high magnetic field, it is shown that one can manipulate both the mechanical spring constant and damping constant by adjusting a potential of a nearby gate electrode. The spring constant effect is shown to be usable to...

  • In vivo nanomechanical imaging of blood-vessel tissues directly in living mammals using atomic force microscopy. Youdong Mao; Sun, Quanmei; Xiufeng Wang; Qi Ouyang; Li Han; Lei Jiang; Dong Han // Applied Physics Letters;7/6/2009, Vol. 95 Issue 1, p013704 

    Atomic force microscopy (AFM) is difficult to achieve in living mammals but is necessary for understanding mechanical properties of tissues in their native form in organisms. Here we report in vivo nanomechanical imaging of blood-vessel tissues directly in living mammalians by AFM combined with...

  • Putting Mechanics into Quantum Mechanics. Schwab, Keith C.; Roukes, Michael L. // Physics Today;Jul2005, Vol. 58 Issue 7, p36 

    Discusses the quantum properties of a mechanical structure. Limitations of applications of nanoelectromechanical systems; Similarity of the classical and quantum descriptions of a mechanical resonator to those of the electromagnetic field in a dielectric cavity; Importance of nanomechanic...

  • Nanomechanical resonant structures in single-crystal diamond. Burek, Michael J.; Ramos, Daniel; Patel, Parth; Frank, Ian W.; Loncˇar, Marko // Applied Physics Letters;9/23/2013, Vol. 103 Issue 13, p131904 

    With its host of outstanding material properties, single-crystal diamond is an attractive material for nanomechanical systems. Here, the mechanical resonance characteristics of freestanding, single-crystal diamond nanobeams fabricated by an angled-etching methodology are reported. Resonance...

  • Vibration analysis of nanomechanical mass sensor using carbon nanotubes under axial tensile loads. Natsuki, Toshiaki; Matsuyama, Nobuhiro; Shi, Jin-Xing; Ni, Qing-Qing // Applied Physics A: Materials Science & Processing;Sep2014, Vol. 116 Issue 3, p1001 

    Carbon nanotubes (CNTs) are nanomaterials with many potential applications due to their excellent mechanical and physical properties. In this paper, we proposed that CNTs with clamped boundary condition under axial tensile loads were considered as CNT-based resonators. Moreover, the resonant...

  • Design and experimental demonstration of optomechanical paddle nanocavities. Healey, Chris; Kaviani, Hamidreza; Wu, Marcelo; Khanaliloo, Behzad; Mitchell, Matthew; Hryciw, Aaron C.; Barclay, Paul E. // Applied Physics Letters;12/7/2015, Vol. 107 Issue 23, p1 

    We present the design, fabrication, and initial characterization of a paddle nanocavity consisting of a suspended sub-picogram nanomechanical resonator optomechanically coupled to a photonic crystal nanocavity. The optical and mechanical properties of the paddle nanocavity can be systematically...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics