TITLE

Impact of current crowding on electromigration-induced mass transport

AUTHOR(S)
Wang, H.; Bruynseraede, C.; Maex, K.
PUB. DATE
January 2004
SOURCE
Applied Physics Letters;1/26/2004, Vol. 84 Issue 4, p517
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
To assess the relevance of current crowding to electromigration-induced mass transport, a test structure was designed to structurally induce and accelerate current crowding in Cu damascene lines. Electromigration experiments and quantitative finite element analysis demonstrate how current crowding can substantially enhance local atomic flux along critical diffusion paths. The resulting flux divergence leads to rapid void nucleation and growth. The observed increase in atomic flux and flux divergence is also moderately affected by the presence of Joule-heating-induced temperature gradients. © 2004 American Institute of Physics.
ACCESSION #
12020896

 

Related Articles

  • Void evolution and its dependence on segment length in Cu interconnects. Leon, R.; Evans, K. C.; Vu, D. T.; Colon, J. A.; Bavarian, B.; Blaschke, V.; Ogawa, E. T.; Ho, P. S. // Journal of Materials Research;Nov2004, Vol. 19 Issue 11, p3135 

    Void evolution during electromigration was studied by recording void nucleation, growth, and displacements at various intervals during thermal (240 °C) and electrical stress tests (2 × 106 amps/cm2) of Cu interconnects. Structural data was collected for various serially arranged line...

  • Influence of long-range interactions in the diffusion of multiparticle systems. Lepore, J.R.; Albano, E.V. // Journal of Chemical Physics;4/1/1998, Vol. 108 Issue 13, p5581 

    Investigates the influence of long-range interactions in the diffusion of multiparticle systems. Comparison of the behavior of non-interacting particles; Effect of dipolar impurities to the diffusion process; Discovery of a smooth maximum in the chemical diffusion coefficient of non-interacting...

  • Influence of edge diffusion on the growth mode on vicinal surfaces. Ratsch, C.; Garcia, J.; Caflisch, R. E. // Applied Physics Letters;10/3/2005, Vol. 87 Issue 14, p141901 

    Growth on vicinal surfaces typically occurs via nucleation and growth of islands or via step flow. In this letter, we present computational results based on an island dynamics model that employs the level-set technique that study the transition between these two competing mechanisms. Our results...

  • Role of the particle size of graphite-like boron nitride in nucleation of cubic boron nitride. S. Bogdanov // Glass Physics & Chemistry;Apr2008, Vol. 34 Issue 2, p213 

    Abstract  The influence of the reduced radius of grains of the graphite-like hexagonal boron nitride (h-BN) on the nucleation of the cubic boron nitride (c-BN) during synthesis from an initiator solution at a...

  • Homogeneous water nucleation and droplet growth in methane and carbon dioxide mixtures at 235 K and 10 bar. Holten, V.; van Dongen, M. E. H. // Journal of Chemical Physics;5/28/2010, Vol. 132 Issue 20, p204504 

    Homogeneous nucleation rates and droplet growth rates of water in pure methane and mixtures of methane and carbon dioxide were measured in an expansion wave tube at 235 K and 10 bar. The nucleation rate in pure methane is three orders of magnitude higher than literature nucleation rates of water...

  • Standardization of Mass Transfer Measurements: A Basis for the Description of Absorption Processes. Hoffmann, A.; Maćkowiak, J. F.; Górak, A.; Haas, M.; Löning, J.-M.; Runowski, T.; Hallenberger, K. // Chemical Engineering Research & Design: Transactions of the Inst;Jan2007, Vol. 85 Issue 1, p40 

    Inaccurate mass transfer measurements may lead to an erroneous design of process equipment, since the accuracy of process modelling strongly depends on the quality of the model parameters. While procedures for measuring model parameters have been standardized for distillation, a standard for...

  • The effect of interlevel dielectric on the critical tensile stress to void nucleation for the reliability of Cu interconnects. Hau-Riege, Christine S.; Hau-Riege, Stefan P.; Marathe, Amit P. // Journal of Applied Physics;11/15/2004, Vol. 96 Issue 10, p5792 

    We have conducted electromigration experiments and modeling on Cu Damascene structures surrounded by different interlevel dielectric ILD and Cu-cap materials. We have determined the mechanical properties of the surrounding ILD and Cu cap to play a key role in the critical stress change to void...

  • Nucleation in A/B/AB blends: Interplay between microphase assembly and macrophase separation. Jiafang Wang; Müller, Marcus; Zhen-Gang Wang // Journal of Chemical Physics;4/21/2009, Vol. 130 Issue 15, p154902 

    We study the interplay between microphase assembly and macrophase separation in A/B/AB ternary polymer blends by examining the free energy of localized fluctuation structures (micelles or droplets), with emphasis on the thermodynamic relationship between swollen micelles (microemulsion) and the...

  • Nucleation in the presence of slow microscopic dynamics. Sear, Richard P. // Journal of Chemical Physics;6/7/2008, Vol. 128 Issue 21, p214513 

    Nucleation of a new thermodynamic phase is often a slow process due to the need to overcome a high free-energy barrier. However, there are other sources of slow dynamics; for example, at high densities/low temperatures, the movement of individual molecules or spins may be slow. Here, we study...

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics