TITLE

KLA-Tencor Upgrades Surfscan with MX 4.0

PUB. DATE
December 2003
SOURCE
Electronic News;12/22/2003, Vol. 49 Issue 51, pN.PAG
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Reports on the enhancement of the capabilities of the Surfscan defect detection tools from KLA-Tencor Corp. Improvement in both process monitoring data and benchmark defect detection; Incorporation of a software upgrade into the design of the tools; Process data that can be detected using the tools; Ability of the tools to haze data.
ACCESSION #
11947431

 

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