Near-diffraction-limited coherent emission from large aperture antiguided vertical-cavity surface-emitting laser arrays

Bao, Ling; Nam-Heon Kim, Ling; Mawst, Luke J.; Elkin, N. N.; Troshchieva, V. N.; Vysotsky, D. V.; Napartovich, A. P.
January 2004
Applied Physics Letters;1/19/2004, Vol. 84 Issue 3, p320
Academic Journal
We demonstrate that in-phase mode operation with a near-diffraction-limited beam can be realized in large aperture (up to 100 elements) antiguided vertical-cavity surface-emitting laser (VCSEL) arrays. A selective etching process with two-step metalorganic chemical vapor deposition is used for fabrication of the antiguided VCSEL array structures. Modal discrimination is enhanced by intentionally choosing a GaAs cap thickness so as to introduce suitable loss to array interelement regions. Far field patterns indicate in-phase mode operation from both triangular and rectangular geometry antiguided VCSEL arrays, which is in good agreement with theory. © 2004 American Institute of Physics.


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