TITLE

KLA, Soitec Team on SOI Inspection

PUB. DATE
December 2003
SOURCE
Electronic News;12/8/2003, Vol. 49 Issue 49, pN.PAG
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Reports on the joint venture between KLA-Tencor and French silicon-on-insulator (SOI) wafer supplier Soitec to improve SOI water quality, yield and production cost. Expectation of the companies on the joint venture partnership; Responsibility of KLA-Tencor in the partnership; Information on the SOI material of Soitec.
ACCESSION #
11903971

 

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