KLA, Soitec Team on SOI Inspection

December 2003
Electronic News;12/8/2003, Vol. 49 Issue 49, pN.PAG
Trade Publication
Reports on the joint venture between KLA-Tencor and French silicon-on-insulator (SOI) wafer supplier Soitec to improve SOI water quality, yield and production cost. Expectation of the companies on the joint venture partnership; Responsibility of KLA-Tencor in the partnership; Information on the SOI material of Soitec.


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