TITLE

Development of cup-shaped micro-electromechanical systems-based vector hydrophone

AUTHOR(S)
Wei Xu; Yuan Liu; Guojun Zhang; Renxin Wang; Chenyang Xue; Wendong Zhang; Jun Liu
PUB. DATE
September 2016
SOURCE
Journal of Applied Physics;2016, Vol. 120 Issue 12, p124502-1
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Similar to the vital performance factors, the receiving sensitivity and the bandwidth exist interactively in the micro-electromechanical systems (MEMS)-based vector hydrophones. Some existing methods can improve the sensitivity of the hydrophone, but these improvements are usually gained at a cost of the bandwidth. However, the cup-shaped MEMS vector hydrophone that is presented in this paper can improve its sensitivity while retaining a sufficient bandwidth. The cupshaped structure acts as a new sensing unit in the MEMS vector hydrophone, replacing the bionic columnar hair that was previously used for sensing. The relationships between the parameters of the cup-shaped structure and the sensitivity of the vector hydrophone were determined by a theoretical deduction. In addition, simulation analyses were performed, and optimized structural parameters were obtained in this work. ANSYS 15.0 simulation was used to derive the optimum characteristics for the cup-shaped structure. The results of the calibration experiments showed that the sensitivity reached up to -188.5 dB (gain of 40 dB, 1 kHz, 0 dB@1 V/lPa), and the bandwidth was in the 20 Hz-1 kHz range, which is sufficient for an underwater acoustic detection at low frequencies. This work has, thus, proved that the cup-shaped vector hydrophone has superior properties for the engineering applications.
ACCESSION #
118516279

 

Related Articles

  • Debye size microprobes for electric field measurements in laboratory plasmas. Pribyl, P.; Gekelman, W.; Nakamoto, M.; Lawrence, E.; Chiang, F.; Stillman, J.; Judy, J.; Katz, N.; Kintner, P.; Niknejadi, P. // Review of Scientific Instruments;Jul2006, Vol. 77 Issue 7, p073504 

    Microelectromechanical systems (MEMS) have led to the development of a host of tiny machines and sensors over the past decade. Plasma physics is in great need of small detectors for several reasons. First of all, very small detectors do not disturb a plasma, and secondly some detectors can only...

  • MEMS Technology Moves Into More Applications. Allan, Roger // Electronic Design;2/18/2002, Vol. 50 Issue 4, p27 

    Reports on the increasing applications of microelectromechanical system technology. Integration of large analog devices with front-end and back-end digital circuitry.

  • MEMS Growth Reflected In Space Instrumentation. Marshall, Sid // R&D Magazine;Jul99, Vol. 41 Issue 8, p37 

    Discusses the applications of microelectromechanical systems and microsystems technology. Presentations at the conference on Micronanotechnology for Space Applications in 1999; Discussion on space instrumentation; Examples of space instrumentation.

  • Industry Roadmap Planned For Microsystems Technology. Marshall, Sid // R&D Magazine;Jul99, Vol. 41 Issue 8, p44 

    Discusses information on microsystems technology (MST). Need for increased functionality and other improvements in technology systems; Status of MST markets worldwide; Application of MST.

  • Defined film thickness leads to more MEMS on SOI. Celler, George K. // Solid State Technology;Dec2003, Vol. 46 Issue 12, p51 

    Features microelectromechanical systems, also commonly referred to in Europe as microsystem technologies, that are currently undergoing what can only be termed as a revolution. Important components that help drive this new wave; Impact of the growing shift from bulk silicon wafers to...

  • MEMS Industry Finally Comes of Age. Bourne, Marlene // Electronic News;04/30/2001, Vol. 47 Issue 18, p12 

    Discusses the applications of microelectromechanical systems (MEMS). Opinion of people on MEMS during the 1990s; Projection on the revenue of MEMS by 2005; Popularity of venture capital funding.

  • MEMS: An enabler of the next internet revolution.  // Solid State Technology;Jan2014, Vol. 57 Issue 1, p2 

    The article presents information on microelectromechanical systems (MEMS).

  • MEMS the Word. Holzmann, Gerard J. // Inc.;2000 Inc. Technology 4, Vol. 22 Issue 17, p184 

    Provides information on micro-electro-mechanical systems (MEMS). Applications of MEMS; Evolution of the system starting from the heliograph invented in 1810.

  • Microreflectors permit passive free-space link. Bains, Sunny // Laser Focus World;Sep2003, Vol. 39 Issue 9, p15 

    Reports on the development of a microelectromechanical systems corner-cube reflector. Modulation at rates up to kilobits per second and voltages.

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics