Enhancement of collimated low-energy broad-beam ion source with four-grid accelerator system

Wåhlin, E. K.; Watanabe, M.; Shimonek, J.; Burtner, D.; Siegfried, D.
December 2003
Applied Physics Letters;12/8/2003, Vol. 83 Issue 23, p4722
Academic Journal
An application of a four-grid ion acceleration system for generating highly collimated low-energy (<1.5 keV) ion beams is presented. The four-grid system offers significantly reduced beam divergence angles for practical low-energy source designs compared to current two- and three-grid systems. Ion beam divergence of the entire beam envelope has been reduced to less than 2° at 250 and 750 eV. Results are also compared with a conventional three-grid system. © 2003 American Institute of Physics.


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