Low-loss as-grown germanosilicate layers for optical waveguides

Ay, Feridun; Aydinli, Atilla; Agan, Sedat
December 2003
Applied Physics Letters;12/8/2003, Vol. 83 Issue 23, p4743
Academic Journal
We report on systematic growth and characterization of low-loss germanosilicate layers for use in optical waveguide technology. The films were deposited by plasma-enhanced chemical vapor deposition technique using silane, germane, and nitrous oxide as precursor gases. Fourier transform infrared spectroscopy was used to monitor the compositional properties of the samples. It was found that addition of germane leads to decreasing of N–H- and O–H-related bonds. The propagation loss values of the planar waveguides were correlated with the decrease in the hydrogen-related bonds of the as-deposited waveguides and resulted in very low values, eliminating the need for high-temperature annealing as is usually done. © 2003 American Institute of Physics.


Related Articles

  • Reply to ‘‘Comment on: ‘The infrared spectrum of the ν3 band of TiF4’ ’’. DeVore, T. C.; Gallaher, T. N. // Journal of Chemical Physics;5/1/1989, Vol. 90 Issue 9, p5210 

    Presents a reply to comments on an article about infrared spectrum. Information on the production of an infrared band; Frequency of the band.

  • Comment on: ‘‘The infrared spectrum of the ν3 band of TiF4’’. Beattie, I. R.; Jones, P. J. // Journal of Chemical Physics;5/1/1989, Vol. 90 Issue 9, p5209 

    Comments on an article on an infrared spectrum of a band. Details on the experiments; Agreement between the matrix and infrared data.

  • Different Approaches to Infrared Spectroscopy.  // R&D Magazine;Jul2000, Vol. 42 Issue 7, p61 

    Discusses several techniques in infrared spectroscopy which are more effective for analyzing specific materials and sample types. Transmission techniques; Attenuated total reflection; Diffuse reflectance; Advantages of the different approaches.

  • The infrared spectrum of D2HF. Lovejoy, Christopher M.; Nelson, David D.; Nesbitt, David J. // Journal of Chemical Physics;12/15/1988, Vol. 89 Issue 12, p7180 

    Ultrasensitive infrared laser absorption spectroscopy in a slit supersonic expansion is used to obtain the spectrum of the HF stretching fundamental of D2HF. Both a Π←Π band due to para-D2HF and a ∑←∑ band due to ortho-D2HF are observed, in contrast to the H2HF...

  • Field-Based IR Instruments. Rein, Alan; Seelenbinder, John // Spectroscopy;Sep2015, Vol. 30 Issue 9, p16 

    A letter to the editor is presented in response to the article "Analysis of the State of Art: IR Spectroscopy" by S. Brown that was published in the June 2015 issue.

  • Field-Based IR Instruments. Bush, Laura // Spectroscopy;Sep2015, Vol. 30 Issue 9, p16 

    The editor's response to a letter responding to the article "Analysis of the State of Art: IR Spectroscopy" by S. Brown that was published in the June 2015 issue is presented.

  • Near-Infrared Spectroscopy as a Process Analytical Tool. Bakeev, Katherine A. // Spectroscopy;Nov2003, Vol. 18 Issue 11, p32 

    Part I. Discusses the application of near-infrared spectrum analysis as a process analytical tool in laboratory settings. Consideration for using long path lengths through near-infrared spectroscopy; Overview of laboratory-based spectroscopic applications; Strategies for laboratory implementation.

  • Calendar of Events.  // Spectroscopy;Feb2011, Vol. 26 Issue 2, p72 

    A calendar of events related to spectroscopy for 2011 is presented which includes the Pittcon 2011 on March 13-18 in Atlanta, Georgia, 15th International Conference on Near Infrared Spectroscopy (ICNRS) on March 13-20 in Cape Town, South Africa, and European Lab Automation Conference on June 30...

  • Contribution of interface roughness to the infrared spectra of thermally grown silicon dioxide... Ishikawa, Kenji; Ogawa, Hiroki // Journal of Applied Physics;4/15/1999 Part 1 of 2, Vol. 85 Issue 8, p4076 

    Presents information on a study of interfacial oxide structures with the use of infrared reflection absorption spectroscopic analysis. Experimental details; Results and discussion; Conclusion.


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics