Microcantilevers integrated with heaters and piezoelectric detectors for nano data-storage application

Lee, Caroline Sunyong; Hyo-Jin Kim; Young-Sik Kim; Won-Hyeog Jin, Caroline Sunyong; Seong-Moon Cho, Caroline Sunyong; Jong-uk Bu, Caroline Sunyong
December 2003
Applied Physics Letters;12/8/2003, Vol. 83 Issue 23, p4839
Academic Journal
A thermomechanical writing system and a piezoelectric readback system have been demonstrated using silicon cantilevers integrated with heaters and piezoelectric sensors for a low-power scanning-probe-microscopy data-storage system. A thin polymethylmethacrylate film has been used as a media to record data bits of 50 nm in diameter and 25 nm in depth using the silicon cantilever. The sensitivity of 0.22 fC/nm was also obtained using the fabricated cantilever. Finally, to obtain readback signals using the piezoelectric cantilever, a patterned oxide wafer with 30 nm depth was scanned to show the distinctive charge signals. © 2003 American Institute of Physics.


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