Patterned growth of single-walled carbon nanotube arrays from a vapor-deposited Fe catalyst

Peng, H. B.; Ristroph, T. G.; Schurmann, G. M.; King, G. M.; Yoon, J.; Narayanamurti, V.; Golovchenko, J. A.
November 2003
Applied Physics Letters;11/17/2003, Vol. 83 Issue 20, p4238
Academic Journal
Single-walled carbon nanotubes have been grown on a variety of substrates by chemical vapor deposition using low-coverage vacuum-deposited iron as a catalyst. Ordered arrays of suspended nanotubes ranging from submicron to several micron lengths have been obtained on Si, SiO[sub 2], Al[sub 2]O[sub 3], and Si[sub 3]N[sub 4] substrates that were patterned on hundred nanometer length scales with a focused ion beam machine. Electric fields applied during nanotube growth allow the control of growth direction. Nanotube circuits have been constructed directly on contacting metal electrodes of Pt/Cr patterned with catalysts. Patterning with solid iron catalyst is compatible with modern semiconductor fabrication strategies and may contribute to the integration of nanotubes in complex device architectures. © 2003 American Institute of Physics.


Related Articles

  • Carbon nanotube forests as top electrode in electroacoustic resonators. Esconjauregui, Santiago; Makaryan, Taron; Mirea, Teona; DeMiguel-Ramos, Mario; Olivares, Jimena; Yuzheng Guo; Hisashi Sugime; D'Arsié, Lorenzo; Junwei Yang; Bhardwaj, Sunil; Cepek, Cinzia; Robertson, John; Iborra, Enrique // Applied Physics Letters;9/28/2015, Vol. 107 Issue 13, p1 

    We grow carbon nanotube forests on piezoelectric AlN films and fabricate and characterize nanotube-based solidly mounted bulk acoustic wave resonators employing the forests as the top electrode material. The devices show values for quality factor at anti-resonance of ~430, and at resonance of...

  • Growth of vertically-aligned carbon nanotube forests on conductive cobalt disilicide support. Zhang, C.; Yan, F.; Allen, C. S.; Bayer, B. C.; Hofmann, S.; Hickey, B. J.; Cott, D.; Zhong, G.; Robertson, J. // Journal of Applied Physics;Aug2010, Vol. 108 Issue 2, p024311 

    We report the thermal chemical vapor deposition of vertically-aligned multiwalled carbon nanotube forests directly onto electrically conductive cobalt disilicide (CoSi2) support using Fe as catalyst. We find that CoSi2 support layer is able to prevent the agglomeration of the catalyst and favor...

  • Single-walled carbon nanotube growth from ion implanted Fe catalyst. Choi, Yongho; Sippel-Oakley, Jennifer; Ural, Ant // Applied Physics Letters;10/9/2006, Vol. 89 Issue 15, p153130 

    The authors present experimental evidence that single-walled carbon nanotubes can be grown by chemical vapor deposition from ion implanted iron catalyst. They systematically characterize the effect of ion implantation dose and energy on the catalyst nanoparticles and nanotubes formed at 900...

  • Characterization and Field Emission Studies of Uniformly Distributed Multi-Walled Carbon Nanotubes (MWCNTs) Film Grown by Low-pressure Chemical Vapour Deposition (LPCVD). Ali, Javid; Kumar, Avshish; Husain, Samina; Kumari, Monika; Harsh; Husain, Mushahid // Current Nanoscience;Jun2011, Vol. 7 Issue 3, p333 

    Carbon nanotubes are synthesized by Low Pressure Chemical Vapor Deposition (LPCVD) system using NH3: C2H2:H2 gas mixtures on iron coated silicon substrate. The iron catalyst was coated on silicon using RF-sputtering method. The growth temperature was kept at 600 °C and growth time was 10...

  • Carbon nanotubes grown on In2O3:Sn glass as large area electrodes for organic photovoltaics. Miller, Anthony J.; Hatton, Ross A.; Chen, G. Y.; Silva, S. Ravi P. // Applied Physics Letters;1/8/2007, Vol. 90 Issue 2, p023105 

    The authors report the growth of multiwall carbon nanotubes directly onto indium tin oxide glass via chemical vapor deposition as large area semitransparent electrodes for organic solar cell applications. The rate of nanotube growth on this ternary oxide is greatly reduced as compared to that of...

  • Effects of the Fe–Co interaction on the growth of multiwall carbon nanotubes. Li, Zhongrui; Dervishi, Enkeleda; Xu, Yang; Ma, Xiaodong; Saini, Viney; Biris, Alexandru S.; Little, Reginald; Biris, Alexandru R.; Lupu, Dan // Journal of Chemical Physics;8/21/2008, Vol. 129 Issue 7, p074709 

    The influences of active species Fe–Co composition on the growth of carbon nanotubes (CNTs) were systemically investigated. CNTs were grown from the pyrolytic decomposition of C2H2 over Fe–Co/CaCO3 catalysts by radio frequency chemical vapor deposition (CVD). The catalyst...

  • Size-selective growth of double-walled carbon nanotube forests from engineered iron catalysts. Yamada, Takeo; Namai, Tatsunori; Hata, Kenji; Futaba, Don N.; Mizuno, Kohei; Fan, Jing; Yudasaka, Masako; Yumura, Motoo; Iijima, Sumio // Nature Nanotechnology;Nov2006, Vol. 1 Issue 2, p131 

    We have succeeded in synthesizing vertically aligned doubled-walled carbon nanotube (DWNT) forests with heights of up to 2.2 mm by water-assisted chemical vapour deposition (CVD). We achieved 85% selectivity of DWNTs through a semi-empirical analysis of the relationships between the tube type...

  • Chains of Carbon Nanotetrahedra/Nanoribbons. Kohno, Hideo; Hasegawa, Takayuki // Scientific Reports;2/13/2015, p8430 

    Flattening of a carbon nanotube results in the formation of a carbon nanoribbon with well-defined edges. In addition, a switching of the flattening direction by about a right angle yields a carbon nanotetrahedron at the switching point in a nanoribbon. Here, we report that chains of carbon...

  • Effect of Different Catalyst Deposition Technique on Aligned Multiwalled Carbon Nanotubes Grown by Thermal Chemical Vapor Deposition. Mohamed Saheed, Mohamed Shuaib; Mohamed, Norani Muti; Burhanudin, Zainal Arif // Journal of Nanomaterials;2014, p1 

    The paper reported the investigation of the substrate preparation technique involving deposition of iron catalyst by electron beam evaporation and ferrocene vaporization in order to produce vertically aligned multiwalled carbon nanotubes array needed for fabrication of tailored devices. Prior to...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics