TITLE

Patterned growth of single-walled carbon nanotube arrays from a vapor-deposited Fe catalyst

AUTHOR(S)
Peng, H. B.; Ristroph, T. G.; Schurmann, G. M.; King, G. M.; Yoon, J.; Narayanamurti, V.; Golovchenko, J. A.
PUB. DATE
November 2003
SOURCE
Applied Physics Letters;11/17/2003, Vol. 83 Issue 20, p4238
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Single-walled carbon nanotubes have been grown on a variety of substrates by chemical vapor deposition using low-coverage vacuum-deposited iron as a catalyst. Ordered arrays of suspended nanotubes ranging from submicron to several micron lengths have been obtained on Si, SiO[sub 2], Al[sub 2]O[sub 3], and Si[sub 3]N[sub 4] substrates that were patterned on hundred nanometer length scales with a focused ion beam machine. Electric fields applied during nanotube growth allow the control of growth direction. Nanotube circuits have been constructed directly on contacting metal electrodes of Pt/Cr patterned with catalysts. Patterning with solid iron catalyst is compatible with modern semiconductor fabrication strategies and may contribute to the integration of nanotubes in complex device architectures. © 2003 American Institute of Physics.
ACCESSION #
11421568

 

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