TITLE

Fabrication of elastomeric stamps with polymer-reinforced sidewalls via chemically selective vapor deposition polymerization of poly(p-xylylene)

AUTHOR(S)
Suh, Kahp Y.; Langer, Robert; Lahann, Jörg
PUB. DATE
November 2003
SOURCE
Applied Physics Letters;11/17/2003, Vol. 83 Issue 20, p4250
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We report on the preparation of polydimethylsiloxane stamps with selectively grown polymer sidewalls by chemical vapor deposition polymerization of poly(p-xylylene). Using a thin iron layer as an inhibitor, the deposition occurs only on the sidewalls of the features in relief, resulting in a polymer-reinforced stamp. The wetting properties of stamps can be restored after removing the thin iron layer with an acidic solution, which has been verified by pattern transfer to an underlying substrate using molding and microcontact printing. © 2003 American Institute of Physics.
ACCESSION #
11421564

 

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