TITLE

NEWS & PRODUCTS

PUB. DATE
November 2003
SOURCE
Microlithography World;Nov2003, Vol. 12 Issue 4, p22
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Presents news and products related to the microlithography industry. Evaluation of Sony and Samsung on the 1:1 e-beam lithography tool of Leepl Corp.; Appointment of Anthony Yen at the lithography market development unit of Cymer Inc.; Installation of Nanonex 1000 upgradable thermal imprintor to the University of Michigan, Ann Arbor campus.
ACCESSION #
11343848

 

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