Scattering bars

Mack, Chris A.
November 2003
Microlithography World;Nov2003, Vol. 12 Issue 4, p14
Trade Publication
Provides information on the technique of scattering bars also called subresolution assist features for optical proximity correction. Approaches used under the resolution enhancement technologies; Discussion of the problem of iso-dense bias; Role of the scattering bars in the depth of focus of the dense features.


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