TITLE

Scattering bars

AUTHOR(S)
Mack, Chris A.
PUB. DATE
November 2003
SOURCE
Microlithography World;Nov2003, Vol. 12 Issue 4, p14
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Provides information on the technique of scattering bars also called subresolution assist features for optical proximity correction. Approaches used under the resolution enhancement technologies; Discussion of the problem of iso-dense bias; Role of the scattering bars in the depth of focus of the dense features.
ACCESSION #
11343845

 

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