Who can afford advanced lithography?

Silverman, Peter J.
November 2003
Microlithography World;Nov2003, Vol. 12 Issue 4, p8
Trade Publication
Analyzes the cost of advanced lithography. Discussion of the price trend of the lithography equipment; Effect of the run rate or output of the lithography equipment on the price of the exposure tools; Factors contributing to the cost of patterning a wafer; Calculations of the patterning cost for each process generation.


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