TITLE

Who can afford advanced lithography?

AUTHOR(S)
Silverman, Peter J.
PUB. DATE
November 2003
SOURCE
Microlithography World;Nov2003, Vol. 12 Issue 4, p8
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Analyzes the cost of advanced lithography. Discussion of the price trend of the lithography equipment; Effect of the run rate or output of the lithography equipment on the price of the exposure tools; Factors contributing to the cost of patterning a wafer; Calculations of the patterning cost for each process generation.
ACCESSION #
11343842

 

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