TITLE

White-light interferometry enables MEMs inspection

AUTHOR(S)
Hardin, R. Winn
PUB. DATE
October 2003
SOURCE
Vision Systems Design;Oct2003, Vol. 8 Issue 10, p7
SOURCE TYPE
Periodical
DOC. TYPE
Article
ABSTRACT
Examines the efficiency of the white light interferometry Nano-Or 3-Dscope2000 inspection system in the production of microelectromechanical systems (MEMs). Features of the MEMs devices; System design of the MEMs wafer; Use of similar approach through the Nomarski incident-light differential interference contrast prism.
ACCESSION #
11143689

 

Related Articles

  • Mesoscopic.  // New Scientist;3/18/2006, Vol. 189 Issue 2543, p52 

    The article focuses on microelectromechanical (MEM) devices that operate on the mesoscopic scale. A new generation of MEM machines that operate on the mesoscopic scale are beginning to enter people's everyday lives. Engineers need to understand the mesoscopic world to make them work reliably. A...

  • ST Sets Up 200mm MEMS Fab. Taylor, Colleen // Electronic News;12/4/2006, Vol. 52 Issue 49, p23 

    The article reports that STMicroelectronics has inaugurated a new 200mm semiconductor wafer fabrication line dedicated to microelectromechanical systems (MEMS) devices at its manufacturing site at Agrate, near Milan, Italy. ST claims it is the first major MEMS manufacturer in the world to...

  • MEMS In the Making. Migliore, Matt // Flow Control;Nov2011, Vol. 17 Issue 11, p6 

    The article presents detailed information on the MicroElectroMechanical System (MEMS). MEMS refers to a device possessing small form factor, mechanical operating principle, and electric-based power source. It is stated that as new packaging methods are becoming available for enabling a higher...

  • MODELING AND SIMULATION OF MEMS CHARACTERISTICS: A NUMERICAL INTEGRATION APPROACH. Shaikh, M. Z.; Kodad, S. F.; Jinaga, B. C. // Journal of Theoretical & Applied Information Technology;2008, Vol. 4 Issue 5, p415 

    The advent of precision three-dimensional micro machining technologies in the last couple of decades has seen the birth of an exciting and potentially revolutionary field called Microelectromechanical Systems (MEMS). The complexity of Microsystems is steadily increasing due to the scaling of...

  • Standard Open Tool Packages for MEMS-enabled Products. Da Silva, Mark // Advanced Packaging;Sep2004, Vol. 13 Issue 9, p26 

    Discusses standard open tool packages for microelectromechanical system (MEMS) devices. Packaging costs of MEMS devices; Difference between packaging MEMS components from microelectronics; MEMS packaging complexity; Packaging during the design phase.

  • Reliability and Fatigue Analysis in Cantilever-Based MEMS Devices Operating in Harsh Environments. Tariq Jan, Mohammad; Bin Hamid, Nor Hisham; Md Khir, Mohd Haris; Ashraf, Khalid; Shoaib, Mohammad // Journal of Quality & Reliability Engineering;2014, p1 

    The microelectromechanical system (MEMS) is one of the most diversified fields of microelectronics; it is rated to be the most promising technology of modern engineering. MEMS can sense, actuate, and integrate mechanical and electromechanical components of micro- and nano sizes on a single...

  • Anisotropic piezoeffect in microelectromechanical systems based on epitaxial Al0.5Ga0.5As/AlAs heterostructures. Vopilkin, E. A.; Shashkin, V. I.; Drozdov, Yu. N.; Daniltsev, V. M.; Klimov, A. Yu.; Rogov, V. V.; Shuleshova, I. Yu. // Technical Physics;Oct2009, Vol. 54 Issue 10, p1476 

    A microelectromechanical system is created that has the form of a cantilever-fitted microbar with a cross-sectional area of several square micrometers. The system is formed by applying epitaxial AlGaAs layers on the GaAs(001) surface and selective chemical etching of the AlAs layer lying under...

  • Analysis of optical interferometric displacement detection in nanoelectromechanical systems. Karabacak, D.; Kouh, T.; Ekinci, K. L. // Journal of Applied Physics;12/15/2005, Vol. 98 Issue 12, p124309 

    Optical interferometry has found recent use in the detection of nanometer scale displacements of nanoelectromechanical systems (NEMS). At the reduced length scale of NEMS, these measurements are strongly affected by the diffraction of light. Here, we present a rigorous numerical model of optical...

  • MEMS on the Move: Motion Sensors for the Masses. Allan, Roger // Electronic Design;6/7/2007, Vol. 55 Issue 12, p43 

    The article discusses the benefits of steady advances in low-cost, low-power, and small-size advances brought about by the maturation in the design and manufacturing methods of microelectromechanicalsystem (MEMS) sensor technology. Intricately, the advancement of these accelerators and...

Share

Read the Article

Courtesy of

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics