White-light interferometry enables MEMs inspection

Hardin, R. Winn
October 2003
Vision Systems Design;Oct2003, Vol. 8 Issue 10, p7
Examines the efficiency of the white light interferometry Nano-Or 3-Dscope2000 inspection system in the production of microelectromechanical systems (MEMs). Features of the MEMs devices; System design of the MEMs wafer; Use of similar approach through the Nomarski incident-light differential interference contrast prism.


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