Titanium metal quantum-dot composite induced by subplantation

Zhao, J.P.; Huang, D.X.; Jacobson, A.J.; Rabalais, J.W.
October 2003
Applied Physics Letters;10/27/2003, Vol. 83 Issue 17, p3590
Academic Journal
Crystalline titanium nanodots have been formed in the subsurface layer of single-crystal SiO[sub 2], i.e., a Ti-based metal quantum dot composite, by subplantation of 9 keV Ti[sup +] ions. Transmission electron microscopy images show that the Ti nanodots have a single, uniform size distribution of ∼3–4 nm, they are single crystals of mainly the Ti bcc β-phase, and their position in the subsurface is controllable through the ion energy. The unique features of subplantation for promoting the precipitation/clustering of crystalline Ti nanodots are discussed. These results confirm previous findings based on the linear optical properties of Ti in SiO[sub 2]. © 2003 American Institute of Physics.


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