Fundamental mode 5 GHz surface-acoustic-wave filters using optical lithography

Makkonen, T.; Plessky, V.P.; Steichen, W.; Chamaly, S.; Poirel, C.; Solal, M.; Salomaa, M.M.
October 2003
Applied Physics Letters;10/27/2003, Vol. 83 Issue 17, p3596
Academic Journal
Resonators and bandpass filters have been implemented in the 5 GHz frequency range, based on “longitudinal leaky” surface-acoustic waves on standard YZ-cut lithium niobate substrate. The synchronous one-port resonators constituting a ladder filter operate in the fundamental mode. The electrode width in the resonators is above 0.25 μm, thus making them readily accessible for fabrication with optical lithography. Test resonators are fabricated to study the effects of the metallization ratio and aperture on the resonator behavior. For the prototype filter, a center frequency of 5.20 GHz, a wide fractional 3 dB bandwidth of 6.3%, a minimum insertion loss of 3.3 dB and a high stopband suppression of 25 dB have been achieved. © 2003 American Institute of Physics.


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