Thermal expansion coefficient of hydrogenated amorphous carbon

Marques, F. C.; Lacerda, R. G.; Champi, A.; Stolojan, V.; Cox, D. C.; Silva, S. R. P.
October 2003
Applied Physics Letters;10/13/2003, Vol. 83 Issue 15, p3099
Academic Journal
The coefficient of thermal expansion (CTE) of hydrogenated amorphous carbon (a-C:H) was investigated as a function of the concentration of sp[sup 2] hybridization. The CTE, determined using the thermally induced bending technique, depends on the concentration of sp[sup 2] bonded carbon, increasing to the value of graphite as the sp[sup 2] concentration approaches 100%. By using a combination of the thermally induced bending technique and nanohardness measurements, we extract separately the Young’s modulus and Poisson’s ratio of the a-C:H films as function of the sp[sup 2] concentration. © 2003 American Institute of Physics.


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