TITLE

Avalanche ballistic electron emission microscopy with single hot-electron sensitivity

AUTHOR(S)
Heller, E.R.; Tivarus, C.; Pelz, J.P.
PUB. DATE
October 2003
SOURCE
Applied Physics Letters;10/6/2003, Vol. 83 Issue 14, p2841
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We discuss an implementation of ballistic electron emission microscopy (BEEM), in which the metallic or metal–insulator “stack” of interest is formed directly over an avalanche p–n diode. This allows nanometer-resolution studies of hot-electron transport through technologically important device stacks with up to single electron sensitivity and >10 kHz measurement bandwidth when the avalanche diode is cooled to <200 K. © 2003 American Institute of Physics.
ACCESSION #
10964880

 

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