Temperature effect on ultrathin SiO[sub 2] time-dependent-dielectric-breakdown

Cheung, Kin P.
September 2003
Applied Physics Letters;9/22/2003, Vol. 83 Issue 12, p2399
Academic Journal
The unusually high temperature acceleration in ultrathin oxide time-dependentdielectric-breakdown and the non-Arrhenius behavior are one of the current outstanding puzzles in oxide reliability research. In this letter, both phenomena are explained using the recently developed kinetic model. It is found that in thick oxide the degradation kinetic is controlled by hole trapping while in thin oxide it is controlled by the consumption of trapped holes. The consumption of trapped holes is further found to be a competition between hole detrapping and electron capturing, leading to the observed non-Arrhenius behavior. © 2003 American Institute of Physics.


Related Articles

  • Autocyclic circular breakdowns with induced bubble collapse in electrolyte. Teslenko, V. S.; Drozhzhin, A. P.; Sankin, G. N. // Technical Physics Letters;Feb2006, Vol. 32 Issue 2, p149 

    The mechanism responsible for the development of autocyclic circular breakdowns in electrolyte as a result of the electric discharge within a hole in a dielectric plate has been experimentally studied. It is demonstrated that the breakdowns are caused by an axisymmetric electrohydrodynamic...

  • Breakdown of a wire-to-plane discharge: Transient effects. Jog, M. A.; Cohen, I. M.; Ayyaswamy, P. S. // Physics of Fluids B: Plasma Physics;Dec91, Vol. 3 Issue 12, p3532 

    A wire-to-plane discharge during the early phases of breakdown has been studied. The discharge has been modeled in a prolate spheroidal coordinate system with the wire shape taken as a hyperboloid of revolution. Four simultaneous coupled, time-dependent, nonlinear partial differential equations...

  • A new model for dielectric-breakdown phenomenon in silicon dioxide films. Chen, D. N.; Cheng, Y. C. // Journal of Applied Physics;2/15/1987, Vol. 61 Issue 4, p1592 

    Suggests a model which attempts to explain the entire dielectric breakdown procedure. Mathematical relationship accounting for the effects of oxide thickness, defects, mobile positive ions and the width of the band gap on the dielectric strength and breakdown mechanism; Correlation of...

  • Triggered breakdown in low-pressure hollow cathode (pseudospark) discharges. Pitchford, L. C.; Ouadoudi, N.; Boeuf, J. P.; Legentil, M.; Puech, V.; Thomaz, J. C.; Gundersen, M. A. // Journal of Applied Physics;7/1/1995, Vol. 78 Issue 1, p77 

    Presents a study that investigated the triggered breakdown in low-pressure hollow cathode discharges. Influence of the discharge conditions, geometry and trigger conditions on the time to breakdown in helium; Relation between the time to breakdown and the geometrical distribution of injected...

  • Electric breakdown along a jet electrolytic cathode at low pressures. Gaisin, Al. F.; Son, E. E. // High Temperature;Oct2010, Vol. 48 Issue 5, p747 

    The article discusses a study which examines the development of electric breakdown along a jet electrolytic cathode at low pressures. Findings of the study reveal that the breakdown occurs when there is a discharge between a metal tube and plane metal anode with transformation to low-pressure...

  • Low-temperature avalanche breakdown in p-Ge: Influence of the acceptor concentration. Morhard, K. D.; Huebener, R. P.; Clauss, W.; Peinke, J. // Journal of Applied Physics;4/1/1992, Vol. 71 Issue 7, p3336 

    Presents information on a study that examined the variation of the breakdown field with the acceptor concentration and with the length of the breakdown region between the ohmic contacts in ρ-germanium. Experimental procedures; Results and discussion; Conclusion.

  • Electric breakdown of longitudinally shocked Pb(Zr0.52Ti0.48)O3 ceramics. Shkuratov, Sergey I.; Talantsev, Evgueni F.; Baird, Jason // Journal of Applied Physics;Jul2011, Vol. 110 Issue 2, p024113 

    Electric breakdown of longitudinally-shock-compressed Pb(Zr0.52Ti0.48)O3 (PZT 52/48) ferroelectric ceramics was experimentally investigated. It was found that a dependence of breakdown field strength, Eg, of shocked ferroelectrics on the thickness of the element, d, ranging from 0.65 to 6.5 mm...

  • Strain manipulation in BaTiO[sub 3]/SrTiO[sub 3] artificial lattice toward high dielectric constant and its nonlinearity. Kim, Leejun; Jung, Donggeun; Kim, Juho; Kim, Young Sung; Lee, Jaichan // Applied Physics Letters;3/31/2003, Vol. 82 Issue 13, p2118 

    Enhancement of dielectric properties has been demonstrated in BaTiO[SUB3] (BTO)/SrTiO[SUB3] (STO) strained artificial lattice. Large variation of lattice distortion in the consisting BTO and STO layers was achieved by varying a stacking sequence of BTO and STO layers. From this strain...

  • Deeply undercritical microwave discharge excited by the field of a quasi-optical electromagnetic beam in a supersonic air jet. Bychkov, D. V.; Grachev, L. P.; Esakov, I. I. // Technical Physics;Mar2009, Vol. 54 Issue 3, p365 

    Electric discharge in a supersonic air jet is studied. It is ignited in a linearly polarized quasi-optical microwave electromagnetic beam the initial field intensity of which is much lower than the breakdown level. Electric breakdown is initiated by a tubular electromagnetic vibrator, one end of...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics